Microelectromechanical systems.

Overview
Works: 92 works in 37 publications in 37 languages
Titles
Principles and applications of NanoMEMS physics / by: (Language materials, printed)
Micromechatronics / by: (Language materials, printed)
Micro- and nanosystems for biotechnology / by: (Language materials, printed)
Micro electro mechanical systems by: (Electronic resources)
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