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Two Design Improvements in MEMS Levitation Actuators.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Two Design Improvements in MEMS Levitation Actuators./
Author:	Tian, Yu.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2021,
Description:	79 p.
Notes:	Source: Masters Abstracts International, Volume: 83-02.
Contained By:	Masters Abstracts International83-02.
Subject:	Mechanical engineering. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28542280
ISBN:	9798534664089

Two Design Improvements in MEMS Levitation Actuators.
Tian, Yu.

Two Design Improvements in MEMS Levitation Actuators. - Ann Arbor : ProQuest Dissertations & Theses, 2021 - 79 p.

Source: Masters Abstracts International, Volume: 83-02.

Thesis (M.S.)--State University of New York at Binghamton, 2021.

This item must not be sold to any third party vendors.

Microelectromechanical systems (MEMS) with electrostatic actuation are very common in electronic products. The classic parallel-plate electrode design suffers from two main flaws: pull-in instability and a short travel range of the movable electrode, which facilitates electrostatic repulsive configuration. The levitation actuation solves the problem mainly by inducing an upward net force based on the electric field. We will discuss two improvements for levitation actuators. One design is a modification for the movable cantilever beam to a T-beam. Compared to a cantilever beam, a larger surface area, lower natural frequency, and higher amplitude in oscillation enable a sensor prototype that can accommodate targeted analytes and have a remarkable signal-to-noise ratio and response time. The additional optimization of dimensions for the levitation actuator takes advantage of genetic algorithms and allows for enhanced actuation force and reduced device size. The optimal solution not only guides researchers to do a trade-off for distant zero-force position and large actuation force but also explains the problem of going beyond the zero-force position because of the force distribution along the movable beam. Thus, optimization of levitation actuators can provide us promising applications of lower voltage consumption and outstanding resonant behaviors.

ISBN: 9798534664089Subjects--Topical Terms:

649730
Mechanical engineering.
Subjects--Index Terms:

Microelectromechanical systems

Two Design Improvements in MEMS Levitation Actuators.
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245 1 0 $a Two Design Improvements in MEMS Levitation Actuators.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2021
300 $a 79 p.
500 $a Source: Masters Abstracts International, Volume: 83-02.
500 $a Advisor: Towfighian, Shahrzad.
502 $a Thesis (M.S.)--State University of New York at Binghamton, 2021.
506 $a This item must not be sold to any third party vendors.
520 $a Microelectromechanical systems (MEMS) with electrostatic actuation are very common in electronic products. The classic parallel-plate electrode design suffers from two main flaws: pull-in instability and a short travel range of the movable electrode, which facilitates electrostatic repulsive configuration. The levitation actuation solves the problem mainly by inducing an upward net force based on the electric field. We will discuss two improvements for levitation actuators. One design is a modification for the movable cantilever beam to a T-beam. Compared to a cantilever beam, a larger surface area, lower natural frequency, and higher amplitude in oscillation enable a sensor prototype that can accommodate targeted analytes and have a remarkable signal-to-noise ratio and response time. The additional optimization of dimensions for the levitation actuator takes advantage of genetic algorithms and allows for enhanced actuation force and reduced device size. The optimal solution not only guides researchers to do a trade-off for distant zero-force position and large actuation force but also explains the problem of going beyond the zero-force position because of the force distribution along the movable beam. Thus, optimization of levitation actuators can provide us promising applications of lower voltage consumption and outstanding resonant behaviors.
590 $a School code: 0792.
650 4 $a Mechanical engineering. $3 649730
650 4 $a Engineering. $3 586835
650 4 $a Electrical engineering. $3 649834
650 4 $a Microelectromechanical systems. $3 567138
650 4 $a Simulation. $3 644748
650 4 $a Electrodes. $3 629151
650 4 $a Genetic algorithms. $3 533907
650 4 $a Sensors. $3 3549539
650 4 $a Equilibrium. $3 668417
650 4 $a Approximation. $3 3560410
650 4 $a Design. $3 518875
650 4 $a Energy. $3 876794
650 4 $a Boundary conditions. $3 3560411
650 4 $a Ordinary differential equations. $3 3563004
653 $a Microelectromechanical systems
653 $a T-beam
653 $a Voltage consumption
653 $a Resonant behaviors
653 $a Genetic algorithms
653 $a Electrostatic actuation
690 $a 0548
690 $a 0544
690 $a 0537
690 $a 0791
690 $a 0389
710 2 $a State University of New York at Binghamton. $b Mechanical Engineering. $3 1035655
773 0 $t Masters Abstracts International $g 83-02.
790 $a 0792
791 $a M.S.
792 $a 2021
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28542280