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Two Design Improvements in MEMS Levitation Actuators.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Two Design Improvements in MEMS Levitation Actuators./
作者:	Tian, Yu.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2021,
面頁冊數:	79 p.
附註:	Source: Masters Abstracts International, Volume: 83-02.
Contained By:	Masters Abstracts International83-02.
標題:	Mechanical engineering. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28542280
ISBN:	9798534664089

Two Design Improvements in MEMS Levitation Actuators.
Tian, Yu.

Two Design Improvements in MEMS Levitation Actuators. - Ann Arbor : ProQuest Dissertations & Theses, 2021 - 79 p.

Source: Masters Abstracts International, Volume: 83-02.

Thesis (M.S.)--State University of New York at Binghamton, 2021.

This item must not be sold to any third party vendors.

Microelectromechanical systems (MEMS) with electrostatic actuation are very common in electronic products. The classic parallel-plate electrode design suffers from two main flaws: pull-in instability and a short travel range of the movable electrode, which facilitates electrostatic repulsive configuration. The levitation actuation solves the problem mainly by inducing an upward net force based on the electric field. We will discuss two improvements for levitation actuators. One design is a modification for the movable cantilever beam to a T-beam. Compared to a cantilever beam, a larger surface area, lower natural frequency, and higher amplitude in oscillation enable a sensor prototype that can accommodate targeted analytes and have a remarkable signal-to-noise ratio and response time. The additional optimization of dimensions for the levitation actuator takes advantage of genetic algorithms and allows for enhanced actuation force and reduced device size. The optimal solution not only guides researchers to do a trade-off for distant zero-force position and large actuation force but also explains the problem of going beyond the zero-force position because of the force distribution along the movable beam. Thus, optimization of levitation actuators can provide us promising applications of lower voltage consumption and outstanding resonant behaviors.

ISBN: 9798534664089Subjects--Topical Terms:

649730
Mechanical engineering.
Subjects--Index Terms:

Microelectromechanical systems

Two Design Improvements in MEMS Levitation Actuators.
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500 $a Source: Masters Abstracts International, Volume: 83-02.
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520 $a Microelectromechanical systems (MEMS) with electrostatic actuation are very common in electronic products. The classic parallel-plate electrode design suffers from two main flaws: pull-in instability and a short travel range of the movable electrode, which facilitates electrostatic repulsive configuration. The levitation actuation solves the problem mainly by inducing an upward net force based on the electric field. We will discuss two improvements for levitation actuators. One design is a modification for the movable cantilever beam to a T-beam. Compared to a cantilever beam, a larger surface area, lower natural frequency, and higher amplitude in oscillation enable a sensor prototype that can accommodate targeted analytes and have a remarkable signal-to-noise ratio and response time. The additional optimization of dimensions for the levitation actuator takes advantage of genetic algorithms and allows for enhanced actuation force and reduced device size. The optimal solution not only guides researchers to do a trade-off for distant zero-force position and large actuation force but also explains the problem of going beyond the zero-force position because of the force distribution along the movable beam. Thus, optimization of levitation actuators can provide us promising applications of lower voltage consumption and outstanding resonant behaviors.
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