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Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators./
作者:	Vukasin, Gabrielle Davis.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2021,
面頁冊數:	157 p.
附註:	Source: Dissertations Abstracts International, Volume: 83-09, Section: B.
Contained By:	Dissertations Abstracts International83-09B.
標題:	Microelectromechanical systems. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=29003849
ISBN:	9798209787389

Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators.
Vukasin, Gabrielle Davis.

Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators. - Ann Arbor : ProQuest Dissertations & Theses, 2021 - 157 p.

Source: Dissertations Abstracts International, Volume: 83-09, Section: B.

Thesis (Ph.D.)--Stanford University, 2021.

This item must not be sold to any third party vendors.

This work focuses on quantifying and minimizing energy loss in encapsulated capacitive microelectromechanical (MEM) resonators. This is important to reduce phase and frequency noise in the output signal of these resonators. Improving upon these metrics creates accelerometers, gyroscopes, and timing references that have more resolution and higher stability. Energy loss of a MEM resonator is measured by its quality factor, which is the ratio of the energy stored in the resonator to the energy lost per cycle of motion. The common energy loss mechanisms that affect the quality factor of MEM resonators are thermoelastic dissipation (TED), gas damping, Akhiezer damping, and anchor damping. This work quantities energy loss of these loss mechanisms using the different temperature dependence of each mechanism. Insight from quantifying these energy loss mechanisms in different resonator designs is used to design a resonator with a quality factor that is limited by the material loss limit of silicon, which is the highest possible quality factor that a capacitive resonator can achieve, resulting in an fxQ product of 2.2x1013 Hz.Of all of the energy loss mechanisms, anchor damping is the least understood for resonant frequencies below 100 MHz. Anchor damping occurs because mechanical energy leaks out of the resonator at the attachment point, or anchor, to the substrate. This work experimentally explores how factors including outer packaging, substrate thickness, anchor placement, and anchor design affect anchor loss. Anchor damping in a bulk mode resonator was reduced by almost an order of magnitude by removing the silver paste adhering the die to the chip carrier. Thinning the substrate enhances the quality factor by a factor of 1.5x. The placement of anchors at two nodes on the edge of a ring resonator is has a 2x greater quality factor than that of a ring resonator with a center anchor. A more compliant anchor reduces anchor damping by an order of magnitude in bulk mode resonators. These results initiate an understanding of the mechanism by which anchor loss occurs in MEM resonators below 100 MHz.Lastly, this thesis presents a variant of the Epi-Seal encapsulation fabrication process where small and large transduction gaps can be fabricated for resonators without etch-holes. The traditional Epi-Seal process uses epitaxial silicon to seal devices at the wafer level in an oxide-free, particle-free, low pressure environment, creating resonators with long term stability. This new variant is important because it increases the design space for capacitive MEM resonators to include large etch-hole free masses and large and small transduction gaps with all the advantages of the original process.

ISBN: 9798209787389Subjects--Topical Terms:

567138
Microelectromechanical systems.

Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators.
LDR:03803nmm a2200313 4500 001 2349918
005 20221010063657.5
008 241004s2021 ||||||||||||||||| ||eng d
020 $a 9798209787389
035 $a (MiAaPQ)AAI29003849
035 $a (MiAaPQ)STANFORDgr989qf9868
035 $a AAI29003849
040 $a MiAaPQ $c MiAaPQ
100 1 $a Vukasin, Gabrielle Davis. $3 3689344
245 1 0 $a Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2021
300 $a 157 p.
500 $a Source: Dissertations Abstracts International, Volume: 83-09, Section: B.
500 $a Advisor: Kenny, Thomas William;Howe, Roger Thomas;Senesky, Debbie.
502 $a Thesis (Ph.D.)--Stanford University, 2021.
506 $a This item must not be sold to any third party vendors.
520 $a This work focuses on quantifying and minimizing energy loss in encapsulated capacitive microelectromechanical (MEM) resonators. This is important to reduce phase and frequency noise in the output signal of these resonators. Improving upon these metrics creates accelerometers, gyroscopes, and timing references that have more resolution and higher stability. Energy loss of a MEM resonator is measured by its quality factor, which is the ratio of the energy stored in the resonator to the energy lost per cycle of motion. The common energy loss mechanisms that affect the quality factor of MEM resonators are thermoelastic dissipation (TED), gas damping, Akhiezer damping, and anchor damping. This work quantities energy loss of these loss mechanisms using the different temperature dependence of each mechanism. Insight from quantifying these energy loss mechanisms in different resonator designs is used to design a resonator with a quality factor that is limited by the material loss limit of silicon, which is the highest possible quality factor that a capacitive resonator can achieve, resulting in an fxQ product of 2.2x1013 Hz.Of all of the energy loss mechanisms, anchor damping is the least understood for resonant frequencies below 100 MHz. Anchor damping occurs because mechanical energy leaks out of the resonator at the attachment point, or anchor, to the substrate. This work experimentally explores how factors including outer packaging, substrate thickness, anchor placement, and anchor design affect anchor loss. Anchor damping in a bulk mode resonator was reduced by almost an order of magnitude by removing the silver paste adhering the die to the chip carrier. Thinning the substrate enhances the quality factor by a factor of 1.5x. The placement of anchors at two nodes on the edge of a ring resonator is has a 2x greater quality factor than that of a ring resonator with a center anchor. A more compliant anchor reduces anchor damping by an order of magnitude in bulk mode resonators. These results initiate an understanding of the mechanism by which anchor loss occurs in MEM resonators below 100 MHz.Lastly, this thesis presents a variant of the Epi-Seal encapsulation fabrication process where small and large transduction gaps can be fabricated for resonators without etch-holes. The traditional Epi-Seal process uses epitaxial silicon to seal devices at the wafer level in an oxide-free, particle-free, low pressure environment, creating resonators with long term stability. This new variant is important because it increases the design space for capacitive MEM resonators to include large etch-hole free masses and large and small transduction gaps with all the advantages of the original process.
590 $a School code: 0212.
650 4 $a Microelectromechanical systems. $3 567138
650 4 $a Electrodes. $3 629151
650 4 $a Energy. $3 876794
650 4 $a Electrical engineering. $3 649834
690 $a 0544
690 $a 0791
710 2 $a Stanford University. $3 754827
773 0 $t Dissertations Abstracts International $g 83-09B.
790 $a 0212
791 $a Ph.D.
792 $a 2021
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=29003849