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Micro electro mechanical systems

Huang, Qing-An.

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Micro electro mechanical systems

Record Type:	Electronic resources : Monograph/item
Title/Author:	Micro electro mechanical systems/ edited by Qing-An Huang.
other author:	Huang, Qing-An.
Published:	Singapore :Springer Singapore : : 2018.,
Description:	xxiv, 1479 p. :ill. (some col.), digital ;24 cm.
[NT 15003449]:	Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-981-10-5945-2
ISBN:	9789811059452

Micro electro mechanical systems
Micro electro mechanical systems[electronic resource] /edited by Qing-An Huang. - Singapore :Springer Singapore :2018. - xxiv, 1479 p. :ill. (some col.), digital ;24 cm. - Micro/nano technologies,2522-5065. - Micro/nano technologies..

Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.

ISBN: 9789811059452

Standard No.: 10.1007/978-981-10-5945-2doiSubjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: TK7875 / .M537 2018

Dewey Class. No.: 621.381

Micro electro mechanical systems
LDR:02537nmm a2200337 a 4500 001 2142144
003 DE-He213
005 20181112101333.0
006 m d
007 cr nn 008maaau
008 181214s2018 si s 0 eng d
020 $a 9789811059452 $q (electronic bk.)
020 $a 9789811059445 $q (paper)
024 7 $a 10.1007/978-981-10-5945-2 $2 doi
035 $a 978-981-10-5945-2
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7875 $b .M537 2018
072 7 $a TDPB $2 bicssc
072 7 $a TEC009070 $2 bisacsh
072 7 $a TEC008070 $2 bisacsh
082 0 4 $a 621.381 $2 23
090 $a TK7875 $b .M626 2018
245 0 0 $a Micro electro mechanical systems $h [electronic resource] / $c edited by Qing-An Huang.
260 $a Singapore : $b Springer Singapore : $b Imprint: Springer, $c 2018.
300 $a xxiv, 1479 p. : $b ill. (some col.), digital ; $c 24 cm.
490 1 $a Micro/nano technologies, $x 2522-5065
505 0 $a Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.
520 $a This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
650 0 $a Microelectromechanical systems. $3 567138
650 1 4 $a Engineering. $3 586835
650 2 4 $a Mechatronics. $3 737861
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 2 4 $a Microwaves, RF and Optical Engineering. $3 893985
700 1 $a Huang, Qing-An. $3 3321512
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer eBooks
830 0 $a Micro/nano technologies. $3 3321513
856 4 0 $u http://dx.doi.org/10.1007/978-981-10-5945-2
950 $a Engineering (Springer-11647)