MEMS = field models and optimal design /
Di Barba, Paolo.

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  • MEMS = field models and optimal design /
  • Record Type: Electronic resources : Monograph/item
    Title/Author: MEMS/ by Paolo Di Barba, Slawomir Wiak.
    Reminder of title: field models and optimal design /
    Author: Di Barba, Paolo.
    other author: Wiak, Slawomir.
    Published: Cham :Springer International Publishing : : 2020.,
    Description: ix, 190 p. :ill., digital ;24 cm.
    [NT 15003449]: Introduction -- MEMS modelling: distributed vs lumped parameter models -- Engineering electrostatics and boundary-value problems -- Engineering magnetostatics and boundary-value problems -- Steady-conduction field and boundary-value problems.
    Contained By: Springer eBooks
    Subject: Microelectromechanical systems. -
    Online resource: https://doi.org/10.1007/978-3-030-21496-8
    ISBN: 9783030214968
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