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Advanced mems/nems fabrication and sensors

Record Type:	Electronic resources : Monograph/item
Title/Author:	Advanced mems/nems fabrication and sensors/ edited by Zhuoqing Yang.
other author:	Yang, Zhuoqing.
Published:	Cham :Springer International Publishing : : 2022.,
Description:	vi, 312 p. :ill., digital ;24 cm.
[NT 15003449]:	Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.
Contained By:	Springer Nature eBook
Subject:	Microelectromechanical systems. -
Online resource:	https://doi.org/10.1007/978-3-030-79749-2
ISBN:	9783030797492

Advanced mems/nems fabrication and sensors
Advanced mems/nems fabrication and sensors[electronic resource] /edited by Zhuoqing Yang. - Cham :Springer International Publishing :2022. - vi, 312 p. :ill., digital ;24 cm.

Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

ISBN: 9783030797492

Standard No.: 10.1007/978-3-030-79749-2doiSubjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: TK7875 / .A38 2022

Dewey Class. No.: 621.381

Advanced mems/nems fabrication and sensors
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245 0 0 $a Advanced mems/nems fabrication and sensors $h [electronic resource] / $c edited by Zhuoqing Yang.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2022.
300 $a vi, 312 p. : $b ill., digital ; $c 24 cm.
505 0 $a Tip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.
520 $a This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
650 0 $a Microelectromechanical systems. $3 567138
650 0 $a Nanoelectromechanical systems. $3 942280
650 0 $a Microfabrication. $3 743509
650 1 4 $a Nanotechnology and Microengineering. $3 1005737
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 2 4 $a Cyber-physical systems, IoT. $3 3386699
650 2 4 $a Materials Engineering. $3 2071625
700 1 $a Yang, Zhuoqing. $3 3590262
710 2 $a SpringerLink (Online service) $3 836513
773 0 $t Springer Nature eBook
856 4 0 $u https://doi.org/10.1007/978-3-030-79749-2
950 $a Engineering (SpringerNature-11647)