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Levitation micro-systems = applicati...

Poletkin, Kirill.

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Levitation micro-systems = applications to sensors and actuators /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Levitation micro-systems/ by Kirill Poletkin.
其他題名:	applications to sensors and actuators /
作者:	Poletkin, Kirill.
出版者:	Cham :Springer International Publishing : : 2021.,
面頁冊數:	ix, 174 p. :ill., digital ;24 cm.
內容註:	Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.
Contained By:	Springer Nature eBook
標題:	Microelectromechanical systems. -
電子資源:	https://doi.org/10.1007/978-3-030-58908-0
ISBN:	9783030589080

Levitation micro-systems = applications to sensors and actuators /
Poletkin, Kirill.

Levitation micro-systemsapplications to sensors and actuators /[electronic resource] :by Kirill Poletkin. - Cham :Springer International Publishing :2021. - ix, 174 p. :ill., digital ;24 cm. - Microsystems and nanosystems,2198-0063. - Microsystems and nanosystems..

Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

ISBN: 9783030589080

Standard No.: 10.1007/978-3-030-58908-0doiSubjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: TK7875 / .P65 2021

Dewey Class. No.: 621.381

Levitation micro-systems = applications to sensors and actuators /
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