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Introduction to microelectromechanical systems engineering
Record Type:
Electronic resources : Monograph/item
Title/Author:
Introduction to microelectromechanical systems engineering/ Nadim Maluf, Kirt Williams.
Author:
Maluf, Nadim.
other author:
Williams, Kirt.
Published:
Boston :Artech House, : c2004.,
Description:
xx, 283 p. :ill. ;26 cm.
Subject:
Microelectromechanical systems. -
Online resource:
https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=113804An electronic book accessible through the World Wide Web; click for information
ISBN:
1580535917 (electronic bk.)
Introduction to microelectromechanical systems engineering
Maluf, Nadim.
Introduction to microelectromechanical systems engineering
[electronic resource] /Nadim Maluf, Kirt Williams. - 2nd ed. - Boston :Artech House,c2004. - xx, 283 p. :ill. ;26 cm. - Artech House microelectromechanical systems (MEMS) series. - Microelectromechanical systems series..
Includes bibliographical references and index.
Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2004.
Available via World Wide Web.
ISBN: 1580535917 (electronic bk.)Subjects--Topical Terms:
567138
Microelectromechanical systems.
Index Terms--Genre/Form:
542853
Electronic books.
LC Class. No.: TK7875 / .M35 2004eb
Dewey Class. No.: 621.381
Introduction to microelectromechanical systems engineering
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https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=113804
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An electronic book accessible through the World Wide Web; click for information
994
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AMF
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W9032190
電子資源
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