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Adhesion aspects in MEMS-NEMS

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Kim, Seong H.

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Adhesion aspects in MEMS-NEMS

Record Type:	Electronic resources : Monograph/item
Title/Author:	Adhesion aspects in MEMS-NEMS/ edited by S.H. Kim, M.T. Dugger and K.L. Mittal.
other author:	Kim, Seong H.
Published:	Leiden ;Vsp, : c2010,
Description:	1 online resource (xi, 409 p.) :ill.
Notes:	Includes bibliographical references.
Subject:	Microelectromechanical systems. -
Online resource:	http://www.crcnetbase.com/isbn/9789004190948
ISBN:	9004190953 (electronic bk.)

Adhesion aspects in MEMS-NEMS
Adhesion aspects in MEMS-NEMS[electronic resource] /edited by S.H. Kim, M.T. Dugger and K.L. Mittal. - Leiden ;Vsp,c2010 - 1 online resource (xi, 409 p.) :ill.

Includes bibliographical references.

ISBN: 9004190953 (electronic bk.)Subjects--Topical Terms:

567138
Microelectromechanical systems.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TK7875 / .A34 2010

Dewey Class. No.: 621.381

Adhesion aspects in MEMS-NEMS
LDR:00893cmm a2200265La 4500 001 1902336
003 OCoLC
005 20140108090715.0
006 m o d
007 cr |n|||||||||
008 240124s2010 ne a o 000 0 eng d
020 $a 9004190953 (electronic bk.)
020 $a 9789004190955 (electronic bk.)
020 $z 9789004190948 (hbk.)
020 $z 9004190945 (hbk.)
035 $a ocn824353879
035 $a 1902336
040 $a YDXCP $c YDXCP $d OCLCO $d E7B
050 4 $a TK7875 $b .A34 2010
082 0 4 $a 621.381 $2 22
245 0 0 $a Adhesion aspects in MEMS-NEMS $h [electronic resource] / $c edited by S.H. Kim, M.T. Dugger and K.L. Mittal.
260 $a Leiden ; $a Boston : $b Vsp, $c c2010
300 $a 1 online resource (xi, 409 p.) : $b ill.
500 $a Includes bibliographical references.
588 $a Description based on print version record.
650 0 $a Microelectromechanical systems. $3 567138
650 0 $a Nanoelectromechanical systems. $3 942280
650 0 $a Adhesion. $3 818212
650 0 $a Surfaces (Technology) $3 652796
655 4 $a Electronic books. $2 lcsh $3 542853
700 1 $a Kim, Seong H. $3 2018560
700 1 $a Dugger, M. T. $q (Michael T.) $3 3652315
700 1 $a Mittal, K. L., $d 1945- $3 659788
856 4 0 $u http://www.crcnetbase.com/isbn/9789004190948

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W9239564

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EB TK7875 .A34 2010

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