Microelectromechanical systems.

Overview
Works: 97 works in 38 publications in 38 languages
Titles
Principles and applications of NanoMEMS physics / by: (Language materials, printed)
CMOS-MEMS / by: (Language materials, printed)
Principles and Applications of NanoMEMS Physics by: (Language materials, printed)
BioNanoFluidic MEMS by: (Language materials, printed)
Radioisotope thin-film powered microsystems by: (Language materials, printed)
Feedback control of MEMS to atoms by: (Electronic resources)
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