射頻磁控濺鍍法
Overview
| Works: | 3 works in 0 publications in 0 languages | |
|---|---|---|
Titles
以RF PVD製備摻雜氧化鉺和氧化釔的氧化鈦薄膜之光學特性與結構分析 = = Optical Characterization and Structural Analysis of Y3+ codoping on Er3+-doped TiO2 Films by RF PVD /
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(Language materials, printed)
磁控濺鍍法製備閘極氧化層之釓-銦-氧薄膜研究 = = Magnetron Sputtering Gd-In-O Films for Gate Dielectrics of MOS Devices /
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(Language materials, printed)