Microelectromechanical systems - Design and construction.
Overview
| Works: | 13 works in 7 publications in 7 languages | |
|---|---|---|
Titles
Microelectromechanical systems = advanced materials and fabrication methods/
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(Electronic resources)
Design and fabrication of self-powered micro-harvesters = rotating and vibrating micro-power systems /
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(Electronic resources)
Advanced materials and technologies for micro/nano-devices, sensors and actuators
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(Language materials, printed)
Design and development of MEMS based guided beam type piezoelectric energy harvester
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(Electronic resources)
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