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Experimental and modeling analysis f...

Xu, Bing.

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Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings./
作者:	Xu, Bing.
面頁冊數:	370 p.
附註:	Adviser: Michael A. Gevelber.
Contained By:	Dissertation Abstracts International67-09B.
標題:	Engineering, Materials Science. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3232937
ISBN:	9780542869532

Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings.
Xu, Bing.

Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings. - 370 p.

Adviser: Michael A. Gevelber.

Thesis (Ph.D.)--Boston University, 2007.

Electron beam (E-beam) vacuum deposition is extensively used for the production of multi-layered optical coatings. High precision optical coating designs for advanced applications entail complex layer structures that have tight error tolerances. The ability to achieve those designs while consistently producing large volumes is limited by the current E-beam process control capability. In particular, subliming materials pose significant challenges to obtain high yields for precision optical coatings.

ISBN: 9780542869532Subjects--Topical Terms:

1017759
Engineering, Materials Science.

Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings.
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100 1 $a Xu, Bing. $3 1298424
245 1 0 $a Experimental and modeling analysis for developing improved electron beam processing capabilities for precision optical coatings.
300 $a 370 p.
500 $a Adviser: Michael A. Gevelber.
500 $a Source: Dissertation Abstracts International, Volume: 67-09, Section: B, page: 5347.
502 $a Thesis (Ph.D.)--Boston University, 2007.
520 $a Electron beam (E-beam) vacuum deposition is extensively used for the production of multi-layered optical coatings. High precision optical coating designs for advanced applications entail complex layer structures that have tight error tolerances. The ability to achieve those designs while consistently producing large volumes is limited by the current E-beam process control capability. In particular, subliming materials pose significant challenges to obtain high yields for precision optical coatings.
520 $a The focus of this dissertation is to investigate the critical issue required to develop enhanced E-beam processing capability for subliming materials. The primary material analyzed is fused silica (SiO2) due to its importance in optical coating manufacturing and challenges in E-beam processing. This work, however, is applicable to other subliming material such as alumina (Al2O3). Deposition rate control and electron beam sweep pattern design are identified as two critical aspects that can be optimized to significantly reduce process variations that lead to coating performance errors.
520 $a A dynamic model of E-beam silica deposition is developed that captures both the complex process physics and critical equipment characteristics and used to obtain a better understanding of the fundamental sublimation dynamics and to develop improved sweep designs. Experimental characterization of commercial scale systems is performed to reveal major electron gun nonlinearities, important process disturbances, and controller tuning requirements that need to be considered for improving process capability. Model predictions are validated with experimental measurements of steady-state deposition rates, evaporation spot intensity distributions, and dynamic rate responses under the heating of both stationary beam and different sweep patterns.
520 $a The model is used to understand the influence of sweep design parameters, electron beam focus nonlinearities, and the crucible attributes on the resulting source surface temperature and evaporation distributions. The nonlinear temperature dependences of the source surface thermal and deposition rate dynamics are obtained. The relation of sweep pattern design to the resulting deposition rate dynamics and melt surface uniformity are discussed. Improved deposition rate control strategies are experimentally evaluated and significant process and coating performance improvement is demonstrated.
590 $a School code: 0017.
650 4 $a Engineering, Materials Science. $3 1017759
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710 2 0 $a Boston University. $3 1017454
773 0 $t Dissertation Abstracts International $g 67-09B.
790 $a 0017
790 1 0 $a Gevelber, Michael A., $e advisor
791 $a Ph.D.
792 $a 2007
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