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Design and characterization of micro...

Vanhille, Kenneth J.

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Design and characterization of microfabricated three-dimensional millimeter-wave components.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Design and characterization of microfabricated three-dimensional millimeter-wave components./
作者:	Vanhille, Kenneth J.
面頁冊數:	137 p.
附註:	Adviser: Zoya Popovic.
Contained By:	Dissertation Abstracts International68-03B.
標題:	Engineering, Electronics and Electrical. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3256460

Design and characterization of microfabricated three-dimensional millimeter-wave components.
Vanhille, Kenneth J.

Design and characterization of microfabricated three-dimensional millimeter-wave components. - 137 p.

Adviser: Zoya Popovic.

Thesis (Ph.D.)--University of Colorado at Boulder, 2007.

This thesis presents the analysis, design, and measurement of air-filled millimeter-wave rectangular coaxial components microfabricated on 150-mm silicon wafers. There is currently considerable interest in the application of new fabrication techniques for the implementation of classical microwave devices to improve performance while reducing size. In addition, the enabling of the design of novel, heretofore unrealizable devices is of interest. The air-filled transmission lines presented in this thesis have advantages over traditional planar transmission lines in that they are non dispersive, possess high isolation, are amenable to dense integration and sharp turn radii, are low loss for their cross section, and are much smaller than rectangular or circular metallic waveguides for a given frequency. As an example, a 50-O line with a 250 mum by 250 mum cross section has the first higher order mode starting at 450GHz, the losses are 0.22 dB/cm at 26GHz, and the isolation between two adjacent lines with a center-to-center separation of 300 mum is better than 60 dB/cm. In a multi-layer configuration, vias and crossovers with excellent broadband performance are quite naturally implemented. Millimeter-wave designs on both the component and subsystem levels are of interest.Subjects--Topical Terms:

626636
Engineering, Electronics and Electrical.

Design and characterization of microfabricated three-dimensional millimeter-wave components.
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100 1 $a Vanhille, Kenneth J. $3 1297939
245 1 0 $a Design and characterization of microfabricated three-dimensional millimeter-wave components.
300 $a 137 p.
500 $a Adviser: Zoya Popovic.
500 $a Source: Dissertation Abstracts International, Volume: 68-03, Section: B, page: 1845.
502 $a Thesis (Ph.D.)--University of Colorado at Boulder, 2007.
520 $a This thesis presents the analysis, design, and measurement of air-filled millimeter-wave rectangular coaxial components microfabricated on 150-mm silicon wafers. There is currently considerable interest in the application of new fabrication techniques for the implementation of classical microwave devices to improve performance while reducing size. In addition, the enabling of the design of novel, heretofore unrealizable devices is of interest. The air-filled transmission lines presented in this thesis have advantages over traditional planar transmission lines in that they are non dispersive, possess high isolation, are amenable to dense integration and sharp turn radii, are low loss for their cross section, and are much smaller than rectangular or circular metallic waveguides for a given frequency. As an example, a 50-O line with a 250 mum by 250 mum cross section has the first higher order mode starting at 450GHz, the losses are 0.22 dB/cm at 26GHz, and the isolation between two adjacent lines with a center-to-center separation of 300 mum is better than 60 dB/cm. In a multi-layer configuration, vias and crossovers with excellent broadband performance are quite naturally implemented. Millimeter-wave designs on both the component and subsystem levels are of interest.
520 $a Air-filled, copper rectangular coax lines and devices with cross sections between 125 mum by 300 mum and 630 mum by 700 mum are fabricated by Rohm and Haas Electronic Materials LLC according to designs from this thesis. The research focus is the development of usable, high-quality millimeter-wave components which demonstrate the merits of this technology. Ka-band components have been designed, fabricated, and tested. Scaling in frequency has been investigated up to W-band, and the presently used fabrication process could conceivably be used at frequencies into the hundreds of GHz. Connections to probe-based test equipment and standard circuit lines are designed. A method of de-embedding the probe structures of four-port data using the two-port TRL model is developed and shown to agree with simulations.
520 $a Among other components, this thesis presents the design and comprehensive analysis of half-wave metallic cavity resonators fabricated using this technology. To the best of the author's knowledge, the measured quality factor of these resonators comes closer to the theoretical maximum than those of other microfabricated TE101 cavity resonators operating above 10GHz. Branch line couplers with compensation of the reactances of the associated T junctions are designed for operation at 36GHz, fabricated and measured. Several other components have been fabricated, including directional couplers, high-repeatability probe structures, and Lange couplers.
590 $a School code: 0051.
650 4 $a Engineering, Electronics and Electrical. $3 626636
650 4 $a Engineering, Packaging. $3 1025152
690 $a 0544
690 $a 0549
710 2 $a University of Colorado at Boulder. $3 1019435
773 0 $t Dissertation Abstracts International $g 68-03B.
790 $a 0051
790 1 0 $a Popovic, Zoya, $e advisor
791 $a Ph.D.
792 $a 2007
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3256460