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Exploring and exploiting resonance i...

Rhoads, Jeffrey F.

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Exploring and exploiting resonance in coupled and/or nonlinear microelectromechanical oscillators.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Exploring and exploiting resonance in coupled and/or nonlinear microelectromechanical oscillators./
作者:	Rhoads, Jeffrey F.
面頁冊數:	142 p.
附註:	Adviser: Steven W. Shaw.
Contained By:	Dissertation Abstracts International68-09B.
標題:	Applied Mechanics. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3282193
ISBN:	9780549241485

Exploring and exploiting resonance in coupled and/or nonlinear microelectromechanical oscillators.
Rhoads, Jeffrey F.

Exploring and exploiting resonance in coupled and/or nonlinear microelectromechanical oscillators. - 142 p.

Adviser: Steven W. Shaw.

Thesis (Ph.D.)--Michigan State University, 2007.

Mass sensors utilizing resonant microelectromechanical systems (MEMS) have recently garnered significant interest from the engineering research community. While motivations vary, this interest is generally attributed to the fact that resonant m crosensors offer the potential for increased mass sensitivity, in addition to all of the benefits typically attendant to microelectromechanical devices, namely, minimal power consumption, small size, seamless integration with existing integrated circuit technologies, and comparatively low cost. Pertinent to the present study is the fact that the majority of resonant microsensors utilize linear resonance structures. While this approach offers unquestionable utility, because most uncoupled, linear microsensors feature a single dominant degree-of-freedom and a single functionalized surface, these devices are generally capable of detecting only a single analyte. Likewise, since Lorentzian resonance structures are employed, sensor metrics are often constrained by the devices' scale and difficult to control independently.

ISBN: 9780549241485Subjects--Topical Terms:

1018410
Applied Mechanics.

Exploring and exploiting resonance in coupled and/or nonlinear microelectromechanical oscillators.
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245 1 0 $a Exploring and exploiting resonance in coupled and/or nonlinear microelectromechanical oscillators.
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520 $a Mass sensors utilizing resonant microelectromechanical systems (MEMS) have recently garnered significant interest from the engineering research community. While motivations vary, this interest is generally attributed to the fact that resonant m crosensors offer the potential for increased mass sensitivity, in addition to all of the benefits typically attendant to microelectromechanical devices, namely, minimal power consumption, small size, seamless integration with existing integrated circuit technologies, and comparatively low cost. Pertinent to the present study is the fact that the majority of resonant microsensors utilize linear resonance structures. While this approach offers unquestionable utility, because most uncoupled, linear microsensors feature a single dominant degree-of-freedom and a single functionalized surface, these devices are generally capable of detecting only a single analyte. Likewise, since Lorentzian resonance structures are employed, sensor metrics are often constrained by the devices' scale and difficult to control independently.
520 $a The present study seeks to overcome the aforementioned limitations by examining the use of non-traditional microresonator architectures in resonant mass sensing applications. Specifically, the work considers the design, modeling, analysis, and implementation of (i) single input - single output (SISO), multi-analyte sensors based on arrays of coupled microbeam oscillators, (ii) electrostatically-actuated microbeams utilizing purely-parametric excitations, and (iii) resonant microcantilevers utilizing magnetomotive transduction. Each of these systems is believed to be capable of rendering simpler mass sensing systems and/or sensors with improved metrics.
520 $a The first portion of the present study considers the design and development of a SISO, resonant mass sensor capable of detecting multiple target analytes. This device, much like its traditional counterparts, employs linear resonance shifts to indicate a detection event. Here, however, a coupled resonator architecture is used, in conjunction with mode localization, to yield a comparatively-simpler, multi-analyte sensor. While the present work details the sensor's development from conception to testing, particular emphasis is place on system modeling, analysis, and design.
520 $a The second portion of the work examines the use of electrostatically-actuated microbeam systems with purely-parametric excitations. These devices, which utilize symmetric electrostatic actuation, are of direct interest here, because they, unlike their traditional variable-gap counterparts, feature a number of desirable frequency response characteristics, including nearly-ideal stopband rejection, in addition to high noise robustness and high mass sensitivity. In this investigation, particular emphasis is placed on system modeling, nonlinear analysis, and device design.
520 $a The final portion of this dissertation focuses on resonant microcantilevers that utilize electromagnetic actuation and sensing, or so-called magnetomotive transduction. These devices have recently garnered increasing interest due to their scalability and 'self-sensing' capabilities, both of which are highly desirable in resonant mass sensing applications. The first part of this investigation details the modeling, analysis, and predictive design of a representative nonlinear device. This effort is intended to serve as a precursor to the development of self-sensing, nonlinear resonant mass sensors. The latter portion of the investigation examines (analytically and experimentally) the implementation of parametric amplification in a linear, electromagnetically-actuated microbeam system. This low-noise resonance amplification technique should facilitate the development of self-sensing, linear mass sensors.
590 $a School code: 0128.
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