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Optimal design and fabrication of mi...

Ye, Wenjing.

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Optimal design and fabrication of micro-electro-mechanical structures: With applications to comb drives.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Optimal design and fabrication of micro-electro-mechanical structures: With applications to comb drives./
Author:	Ye, Wenjing.
Description:	139 p.
Notes:	Adviser: Subrata Mukherjee.
Contained By:	Dissertation Abstracts International58-12B.
Subject:	Applied Mechanics. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9818464
ISBN:	0591699494

Optimal design and fabrication of micro-electro-mechanical structures: With applications to comb drives.
Ye, Wenjing.

Optimal design and fabrication of micro-electro-mechanical structures: With applications to comb drives. - 139 p.

Adviser: Subrata Mukherjee.

Thesis (Ph.D.)--Cornell University, 1998.

A cubic shaped motor, based on the two-dimensional analysis, is fabricated by using the SCREAM I process. The primary test results show that such a comb drive is more stable than the standard one and could be operated at a relatively low voltage.

ISBN: 0591699494Subjects--Topical Terms:

1018410
Applied Mechanics.

Optimal design and fabrication of micro-electro-mechanical structures: With applications to comb drives.
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005 20110509
008 110509s1998 eng d
020 $a 0591699494
035 $a (UnM)AAI9818464
035 $a AAI9818464
040 $a UnM $c UnM
100 1 $a Ye, Wenjing. $3 1258322
245 1 0 $a Optimal design and fabrication of micro-electro-mechanical structures: With applications to comb drives.
300 $a 139 p.
500 $a Adviser: Subrata Mukherjee.
500 $a Source: Dissertation Abstracts International, Volume: 58-12, Section: B, page: 6655.
502 $a Thesis (Ph.D.)--Cornell University, 1998.
520 $a A cubic shaped motor, based on the two-dimensional analysis, is fabricated by using the SCREAM I process. The primary test results show that such a comb drive is more stable than the standard one and could be operated at a relatively low voltage.
520 $a An efficient methodology for solving inverse problems in micro-electro-mechanical (MEM) systems is proposed in this dissertation. This method is quite general and can be applied to a wide variety of MEM structures. Applications of this method to the design of electrostatic variable shape comb drives, based on two-dimensional and three-dimensional simulations, are presented here. Fabrication of a shaped comb drive, based on two-dimensional analysis, is also demonstrated in this work.
520 $a A comb drive is one of the most important microactuators in MEM systems. In a typical comb drive, the capacitance varies linearly with displacement, resulting in an electrostatic driving force which is independent of the position of the moving fingers (relative to the fixed ones) except at the ends of the range of travel. It is of interest in some applications to have force profiles such as linear, quadratic or cubic. Such shaped actuators could be useful, for example, for electrostatic tuning.
520 $a This dissertation addresses the issues of simulation, and then design (inverse problem) of comb drives with variable gap and height profiles, which results in a two-dimensional and a three-dimensional analysis, respectively. Simulations of the exterior electrostatic field, and resultant forces on the comb drives, are carried out with the exterior, indirect, boundary element method. Following direct simulation, sensitivity analysis is carried out by the direct differentiation approach. The variable of interest is the driving force while the design variables are parameters that determine the shapes of the fingers. Next, an inverse problem is posed as follows: determine the shapes of the fingers such that the driving force is a desired function of the displacement of the comb drive. Comb drives of appropriate shapes, that produce desired force profiles, are obtained by this approach. In the two-dimensional analysis, numerical results are given for shape motors that produce linear, quadratic and cubic profiles as functions of travel. In the three-dimensional analysis, due to limitations of the computer resources, numerical results are given only for shape motors that produce linear and cubic profiles. The optimization codes "dlcong" from the IMSL package and "E04UCF" from the NAG package, are used in the 2D and 3D analysis, respectively, for this phase of the work.
590 $a School code: 0058.
650 4 $a Applied Mechanics. $3 1018410
650 4 $a Engineering, Electronics and Electrical. $3 626636
650 4 $a Engineering, Mechanical. $3 783786
690 $a 0346
690 $a 0544
690 $a 0548
710 2 0 $a Cornell University. $3 530586
773 0 $t Dissertation Abstracts International $g 58-12B.
790 $a 0058
790 1 0 $a Mukherjee, Subrata, $e advisor
791 $a Ph.D.
792 $a 1998
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9818464