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A reconfigurable tactile display bas...

Georgia Institute of Technology.

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A reconfigurable tactile display based on polymer MEMS technology.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	A reconfigurable tactile display based on polymer MEMS technology./
作者:	Wu, Xiaosong.
面頁冊數:	218 p.
附註:	Adviser: Mark G. Allen.
Contained By:	Dissertation Abstracts International69-04B.
標題:	Engineering, Electronics and Electrical. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoeng/servlet/advanced?query=3308846
ISBN:	9780549569800

A reconfigurable tactile display based on polymer MEMS technology.
Wu, Xiaosong.

A reconfigurable tactile display based on polymer MEMS technology. - 218 p.

Adviser: Mark G. Allen.

Thesis (Ph.D.)--Georgia Institute of Technology, 2008.

A tactile display provides information such as shape, texture, temperature, and hardness to a user. Ultimately, a tactile display could be used to recreate a virtual object that may be stored in a computer. However, such advanced displays are not yet widely available, primarily due to the lack of low cost, large area, compact actuator arrays that can stimulate the large numbers of receptors of the user and that can also meet the high requirements for user safety and comfort. This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array.

ISBN: 9780549569800Subjects--Topical Terms:

626636
Engineering, Electronics and Electrical.

A reconfigurable tactile display based on polymer MEMS technology.
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245 1 2 $a A reconfigurable tactile display based on polymer MEMS technology.
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502 $a Thesis (Ph.D.)--Georgia Institute of Technology, 2008.
520 $a A tactile display provides information such as shape, texture, temperature, and hardness to a user. Ultimately, a tactile display could be used to recreate a virtual object that may be stored in a computer. However, such advanced displays are not yet widely available, primarily due to the lack of low cost, large area, compact actuator arrays that can stimulate the large numbers of receptors of the user and that can also meet the high requirements for user safety and comfort. This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array.
520 $a In this work, the concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator ("endoskeletal microbubble actuator") is presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A mass-manufacturable actuator has been fabricated using the approaches of lithography and micromolding. A prototype of a single endoskeletal bubble actuator with a diameter of 2.6mm has been fabricated and characterized.
520 $a In addition, in order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator has been demonstrated.
520 $a Compared to present technologies, the microvalve developed can achieve large flow rate control due to its amplification mechanism, can avoid complex sealing problem because solid rather than liquid medium is used, and can form a dense valve array due to the small lateral dimension of the actuator used.
520 $a To further reduce the cost of the microvalve, a laterally-laminated multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes. This fabrication process is simple and straightforward compared to previous lateral lamination approaches. An 8-layer device has shown a displacement of 0.63 micron at 100V driving voltage, which agrees well with simulation results. The lateral lamination fabrication process provides a valuable alternative for making compact, low-voltage, multilayer piezoelectric micro-actuators as microvalve driving element.
520 $a A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate.
590 $a School code: 0078.
650 4 $a Engineering, Electronics and Electrical. $3 626636
650 4 $a Engineering, Materials Science. $3 1017759
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710 2 $a Georgia Institute of Technology. $3 696730
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791 $a Ph.D.
792 $a 2008
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