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Principles and Applications of NanoM...

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Principles and Applications of NanoMEMS Physics

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Principles and Applications of NanoMEMS Physics/ by Hector J. Santos.
作者:	Santos, Hector J..
出版者:	Boston, MA :Springer, : 2005.,
面頁冊數:	xv, 254 p. :ill., digital ;25 cm.
叢書名:	Microsystems,
Contained By:	Springer e-books
標題:	Microelectromechanical systems. -
電子資源:	http://dx.doi.org/10.1007/b136228http://dx.doi.org/10.1007/b136228
ISBN:	9780387258348 (electronic bk.)

Principles and Applications of NanoMEMS Physics
Santos, Hector J..

Principles and Applications of NanoMEMS Physics[electronic resource] /by Hector J. Santos. - Boston, MA :Springer,2005. - xv, 254 p. :ill., digital ;25 cm. - Microsystems,151389-2134 ;.

ISBN: 9780387258348 (electronic bk.)Subjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: QC688 / .S28 2005

Dewey Class. No.: 537.5

Principles and Applications of NanoMEMS Physics
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650 $a Chemistry. $3 516420
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