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Materials science of thin films = deposition and structure /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Materials science of thin films/ Milton Ohring.
其他題名:	deposition and structure /
作者:	Ohring, Milton,
出版者:	San Diego, CA :Academic Press, : 2002.,
面頁冊數:	xxi, 794 p. :ill.
內容註:	A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
標題:	Thin films. -
電子資源:	https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=92177An electronic book accessible through the World Wide Web; click for information
ISBN:	0585470979 (electronic bk.)

Materials science of thin films = deposition and structure /
Ohring, Milton,1936-

Materials science of thin filmsdeposition and structure /[electronic resource] :Milton Ohring. - 2nd ed. - San Diego, CA :Academic Press,2002. - xxi, 794 p. :ill.

Includes bibliographical references and index.

A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.

Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2003.

Available via World Wide Web.

ISBN: 0585470979 (electronic bk.)Subjects--Topical Terms:

626403
Thin films.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TA418.9.T45 / O47 2002eb

Dewey Class. No.: 621.3815/2

Materials science of thin films = deposition and structure /
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020 $a 0585470979 (electronic bk.)
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049 $a AMFA
050 1 4 $a TA418.9.T45 $b O47 2002eb
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100 $a Ohring, Milton, $d 1936- $3 626402
245 1 0 $a Materials science of thin films $h [electronic resource] : $b deposition and structure / $c Milton Ohring.
250 $a 2nd ed.
260 $a San Diego, CA : $c 2002. $b Academic Press,
300 $a xxi, 794 p. : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
533 $a Electronic reproduction. $b Boulder, Colo. : $c NetLibrary, $d 2003. $n Available via World Wide Web. $n Access may be limited to NetLibrary affiliated libraries.
650 $a Thin films. $3 626403
655 $a Electronic books. $2 lcsh $3 542853
710 $a NetLibrary, Inc. $3 542851
856 4 $3 Bibliographic record display $u https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=92177 $z An electronic book accessible through the World Wide Web; click for information
994 $a 92 $b AMF