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電容式電漿源對高頻響應的模擬分析 = = Simulation of ...

曹晃碩

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電容式電漿源對高頻響應的模擬分析 = = Simulation of high frequency response on capacitive plasma source /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	電容式電漿源對高頻響應的模擬分析 = / 曹晃碩撰
Reminder of title:	Simulation of high frequency response on capacitive plasma source /
remainder title:	Simulation of high frequency response on capacitive plasma source
Author:	曹晃碩
other author:	陳炳宏
Published:	民91[2002],
Description:	[x],89葉 : 圖,表 ; 30公分
Notes:	指導教授: 陳炳宏
Subject:	電漿 -

電容式電漿源對高頻響應的模擬分析 = = Simulation of high frequency response on capacitive plasma source /
曹晃碩

電容式電漿源對高頻響應的模擬分析 = Simulation of high frequency response on capacitive plasma source / Simulation of high frequency response on capacitive plasma source曹晃碩撰 - 民91[2002] - [x],89葉 : 圖,表 ; 30公分

指導教授: 陳炳宏

碩士論文--國立東華大學電機工程研究所,2002

參考書目: 面87-89Subjects--Topical Terms:

2349732
電漿

電容式電漿源對高頻響應的模擬分析 = = Simulation of high frequency response on capacitive plasma source /
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245 1 0 $a 電容式電漿源對高頻響應的模擬分析 = $b Simulation of high frequency response on capacitive plasma source / $c 曹晃碩撰
246 1 1 $a Simulation of high frequency response on capacitive plasma source
260 $c 民91[2002]
300 $a [x],89葉 : $b 圖,表 ; $c 30公分
500 $a 指導教授: 陳炳宏
502 $a 碩士論文--國立東華大學電機工程研究所,2002
504 $a 參考書目: 面87-89
650 7 $a 電漿 $2 csht $3 2349732
700 1 $a 陳炳宏 $e 指導教授 $3 2371382