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Science and technology of semiconduc...

Higashi, Gregg S.

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Science and technology of semiconductor surface preparation : = symposium held April 1-3, 1997, San Francisco, California, U.S.A. /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Science and technology of semiconductor surface preparation :/ editors, Gregg S. Higashi ... [et al.].
其他題名:	symposium held April 1-3, 1997, San Francisco, California, U.S.A. /
其他作者:	Higashi, Gregg S.
出版者:	Pittsburgh, Pa. :Materials Research Society, : c1997.,
面頁冊數:	xiii, 545 p. :ill. ;24 cm.
標題:	Semiconductors - Cleaning -
ISBN:	1558993819 :

Science and technology of semiconductor surface preparation : = symposium held April 1-3, 1997, San Francisco, California, U.S.A. /
Science and technology of semiconductor surface preparation :symposium held April 1-3, 1997, San Francisco, California, U.S.A. /editors, Gregg S. Higashi ... [et al.]. - Pittsburgh, Pa. :Materials Research Society,c1997. - xiii, 545 p. :ill. ;24 cm. - Materials Research Society symposium proceedings,v. 4770272-9172 ;. - Materials Research Society symposia proceedings ;v. 477..

Includes bibliographical references and indexes.

ISBN: 1558993819 :US79.00

LCCN: 97028526Subjects--Topical Terms:

714656
Semiconductors
--Cleaning

LC Class. No.: TK7871.85 / .S396 1997

Dewey Class. No.: 621.3815/2

Science and technology of semiconductor surface preparation : = symposium held April 1-3, 1997, San Francisco, California, U.S.A. /
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700 $a Hirose, Masataka $3 714653
700 $a Raghavan, Srini $3 714654
700 $a Verhaverbeke, Steven $3 714655
830 $a Materials Research Society symposia proceedings ; $v v. 477. $3 714658