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Micro Acoustic Metamaterials for Inn...

Zhao, Xuanyi.

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Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS./
作者:	Zhao, Xuanyi.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2024,
面頁冊數:	137 p.
附註:	Source: Dissertations Abstracts International, Volume: 85-10, Section: B.
Contained By:	Dissertations Abstracts International85-10B.
標題:	Electrical engineering. -
電子資源:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=31241535
ISBN:	9798382318752

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.
Zhao, Xuanyi.

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS. - Ann Arbor : ProQuest Dissertations & Theses, 2024 - 137 p.

Source: Dissertations Abstracts International, Volume: 85-10, Section: B.

Thesis (Ph.D.)--Northeastern University, 2024.

We present a new design for AlScN contour-mode-resonators (CMRs) operating in the radiofrequency (RF) range. This design relies on acoustic metamaterials (AM) based lateral anchors to greatly enhance the power handling compared to conventional CMR-designs. Such anchors generate acoustic stopbands that prevent the leakage of piezo-generated acoustic energy from the resonating body into the substrate. The AM anchors reported in this work consist of the same AlScN film as in the CMRs' active region, combined with a periodic array of SiO2 rods. Their use allows a reduction of CMRs' thermal resistance with respect to conventional designs, and enables a significant temperature compensation. As a result, the CMRs with AM anchors reported in this work show a ∼60% reduction in their Duffing coefficient with respect to conventional designs with fully-etched lateral sides, hence an improved linearity. Furthermore, when used to set the output frequency of high-power feedback loop oscillators, the CMRs with the AM anchors reported here enable a lower phase-noise compared to what achievable when employing the conventional counterparts.

ISBN: 9798382318752Subjects--Topical Terms:

649834
Electrical engineering.
Subjects--Index Terms:

Contour-mode-resonators

Micro Acoustic Metamaterials for Innovative AlN/AlScN-Based RF MEMS.
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520 $a We present a new design for AlScN contour-mode-resonators (CMRs) operating in the radiofrequency (RF) range. This design relies on acoustic metamaterials (AM) based lateral anchors to greatly enhance the power handling compared to conventional CMR-designs. Such anchors generate acoustic stopbands that prevent the leakage of piezo-generated acoustic energy from the resonating body into the substrate. The AM anchors reported in this work consist of the same AlScN film as in the CMRs' active region, combined with a periodic array of SiO2 rods. Their use allows a reduction of CMRs' thermal resistance with respect to conventional designs, and enables a significant temperature compensation. As a result, the CMRs with AM anchors reported in this work show a ∼60% reduction in their Duffing coefficient with respect to conventional designs with fully-etched lateral sides, hence an improved linearity. Furthermore, when used to set the output frequency of high-power feedback loop oscillators, the CMRs with the AM anchors reported here enable a lower phase-noise compared to what achievable when employing the conventional counterparts.
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650 4 $a Electrical engineering. $3 649834
650 4 $a Materials science. $3 543314
650 4 $a Acoustics. $3 879105
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653 $a Radiofrequency range
653 $a Acoustic stopbands
653 $a Fully-etched lateral sides
653 $a Lower phase-noise
690 $a 0544
690 $a 0794
690 $a 0986
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