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Ordinary Differential Equation Multi...

Childs, Carter J.

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Ordinary Differential Equation Multi-Domain Models of MEMS Structures.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Ordinary Differential Equation Multi-Domain Models of MEMS Structures./
Author:	Childs, Carter J.
Published:	Ann Arbor : ProQuest Dissertations & Theses, : 2023,
Description:	119 p.
Notes:	Source: Dissertations Abstracts International, Volume: 85-03, Section: B.
Contained By:	Dissertations Abstracts International85-03B.
Subject:	Microelectromechanical systems. -
Online resource:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=30551163
ISBN:	9798380257978

Ordinary Differential Equation Multi-Domain Models of MEMS Structures.
Childs, Carter J.

Ordinary Differential Equation Multi-Domain Models of MEMS Structures. - Ann Arbor : ProQuest Dissertations & Theses, 2023 - 119 p.

Source: Dissertations Abstracts International, Volume: 85-03, Section: B.

Thesis (Ph.D.)--The Pennsylvania State University, 2023.

Modeling is a pivotal part of any modern design process. The ability to accurately predict designs before building cuts down on development costs leading to faster development cycles. Modeling of transducers has been accomplished in various methods, mostly being compartmentalized into mechanical, electrical, or system models. While each of these models is important, the current solutions require substantial interaction between model types. There exists headroom to expand the system-level models to be less dependent on the subsystem model responses. To accomplish this, techniques developed before comprehensive Finite Element Analysis tools are leveraged and updated to work within modern computational tools, while expanding the repertoire to include modern production techniques of Micro-Electrical-Mechanical-Systems (MEMS). The invention of transmission line models that model the response of physical systems commonly found in MEMS sensory devices was undertaken. The models were built in Mathworks Simscape multidomain modeling software, taking advantage of the multiple domain definitions. The models developed can be used to allow system models to work independently of other models by breaking the dependency of system models on the results of subsystem models. Further, the advantages of multidomain models open up the doors to modeling phenomena that are extremely complex and computationally expensive to complete with available tools. New component models were developed for thin bars and plates as well as thermoviscous models of acoustic enclosures.

ISBN: 9798380257978Subjects--Topical Terms:

567138
Microelectromechanical systems.
Subjects--Index Terms:

Micro-Electrical-Mechanical-Systems

Ordinary Differential Equation Multi-Domain Models of MEMS Structures.
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