| Record Type: |
Electronic resources
: Monograph/item
|
| Title/Author: |
Handbook of emerging materials for semiconductor industry/ edited by Young Suh Song ... [et al.]. |
| other author: |
Song, Young Suh. |
| Published: |
Singapore :Springer Nature Singapore : : 2024., |
| Description: |
xxi, 938 p. :ill. (chiefly col.), digital ;24 cm. |
| [NT 15003449]: |
Introduction to Recent Emerging Materials -- Discovery of Emerging Nanomaterials -- Carbon-based Nanomaterials: Graphite, Graphene, Carbon Nanotube (CNT) -- Metamaterials -- Perovskite Materials -- Insulators and High-k Materials -- Silicon and IV-Group Molecules -- Thermal Function of Nanomaterials -- Mechanical Function of Nanomaterials -- Electrical/Electronic Function of Nanomaterials -- Optical Function of Nanomaterials -- The Other Functions of Nanomaterials -- Introduction to Latest Fabrication Techniques -- Oxidation -- Molecular Layer Growth - CVD, ALD, Epitaxy -- Lithography - E-beam, EUV, NIL -- Ion-Implantation -- Metal Deposition -- AI-driven Design Techniques for Emerging Materials -- Multi-wafer Process. |
| Contained By: |
Springer Nature eReference |
| Subject: |
Semiconductors - Materials. - |
| Online resource: |
https://doi.org/10.1007/978-981-99-6649-3 |
| ISBN: |
9789819966493 |