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Performance Optimization of MEMS Gyroscopes and Their Shock Survivability.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Performance Optimization of MEMS Gyroscopes and Their Shock Survivability./
作者:	Cameron, Christopher Patrick.
面頁冊數:	1 online resource (113 pages)
附註:	Source: Dissertations Abstracts International, Volume: 84-05, Section: B.
Contained By:	Dissertations Abstracts International84-05B.
標題:	Design. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=29756349click for full text (PQDT)
ISBN:	9798357513618

Performance Optimization of MEMS Gyroscopes and Their Shock Survivability.
Cameron, Christopher Patrick.

Performance Optimization of MEMS Gyroscopes and Their Shock Survivability. - 1 online resource (113 pages)

Source: Dissertations Abstracts International, Volume: 84-05, Section: B.

Thesis (Ph.D.)--Stanford University, 2022.

Includes bibliographical references

In recent times, MEMS gyroscopes have become more integral to the way we perceive the world. Recent MEMS gyroscopes address the size, cost, and power consumption considerations that have previously limited gyroscope applications. Of particular interest to this work is the MEMS version of the Disc Resonating Gyroscope (DRG). This design is compatible with wafer-scale manufacturing while also offering improvements such as reduced drift and high signal/noise. If this device is going to be used in wider applications, the quality factor and shock performance need to be examined. In this work, we show that the performance of DRGs can be improved if we alter the traditional structure into a serpentine ring structure. This serpentine ring structure or springy DRG (SRG) shows great potential to have a higher quality factor. We see improvements on the order of 2.5X as well as interesting opportunities for further improvement once the design is parameterized. We find DRG designs that depart from the "Zener curve" for ring resonators, showing greater potential for high-performance applications.On the flip side is that these new applications may also be subject to strong shocks. As MEMS gyroscopes are being used in more applications, understanding their survivability is of paramount performance. We explored the shock survivability profile of over ten DRGs and determined consistent survivability over 50,000g. Even more interesting is the variety of responses to the shocks of the devices. As expected, we see that the quality factor and resonant frequency are affected for some of these devices at these high shock levels. We also see that the frequency tuning curve of these devices had an unpredictable response to great shock. In this work, we find that through shock testing of these devices and parametric optimization of disc resonating gyroscopes, we can have a path to improved performance and gain a more in-depth understanding of shock survivability.

Electronic reproduction.
Ann Arbor, Mich. :
ProQuest,
2023

Mode of access: World Wide Web

ISBN: 9798357513618Subjects--Topical Terms:

518875
Design.
Index Terms--Genre/Form:

542853
Electronic books.

Performance Optimization of MEMS Gyroscopes and Their Shock Survivability.
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245 1 0 $a Performance Optimization of MEMS Gyroscopes and Their Shock Survivability.
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500 $a Source: Dissertations Abstracts International, Volume: 84-05, Section: B.
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520 $a In recent times, MEMS gyroscopes have become more integral to the way we perceive the world. Recent MEMS gyroscopes address the size, cost, and power consumption considerations that have previously limited gyroscope applications. Of particular interest to this work is the MEMS version of the Disc Resonating Gyroscope (DRG). This design is compatible with wafer-scale manufacturing while also offering improvements such as reduced drift and high signal/noise. If this device is going to be used in wider applications, the quality factor and shock performance need to be examined. In this work, we show that the performance of DRGs can be improved if we alter the traditional structure into a serpentine ring structure. This serpentine ring structure or springy DRG (SRG) shows great potential to have a higher quality factor. We see improvements on the order of 2.5X as well as interesting opportunities for further improvement once the design is parameterized. We find DRG designs that depart from the "Zener curve" for ring resonators, showing greater potential for high-performance applications.On the flip side is that these new applications may also be subject to strong shocks. As MEMS gyroscopes are being used in more applications, understanding their survivability is of paramount performance. We explored the shock survivability profile of over ten DRGs and determined consistent survivability over 50,000g. Even more interesting is the variety of responses to the shocks of the devices. As expected, we see that the quality factor and resonant frequency are affected for some of these devices at these high shock levels. We also see that the frequency tuning curve of these devices had an unpredictable response to great shock. In this work, we find that through shock testing of these devices and parametric optimization of disc resonating gyroscopes, we can have a path to improved performance and gain a more in-depth understanding of shock survivability.
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538 $a Mode of access: World Wide Web
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650 4 $a Electrodes. $3 629151
650 4 $a Fiber optics. $3 535869
650 4 $a Stress concentration. $3 747123
650 4 $a Optics. $3 517925
650 4 $a Electrical engineering. $3 649834
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650 4 $a Mechanical engineering. $3 649730
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773 0 $t Dissertations Abstracts International $g 84-05B.
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