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Characterization Of Mems Coriolis Vibratory Gyroscopes.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Characterization Of Mems Coriolis Vibratory Gyroscopes./
作者:	Madeira, Bernardo Pereira.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2021,
面頁冊數:	87 p.
附註:	Source: Dissertations Abstracts International, Volume: 83-09, Section: B.
Contained By:	Dissertations Abstracts International83-09B.
標題:	Receivers & amplifiers. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28992415
ISBN:	9798209812043

Characterization Of Mems Coriolis Vibratory Gyroscopes.
Madeira, Bernardo Pereira.

Characterization Of Mems Coriolis Vibratory Gyroscopes. - Ann Arbor : ProQuest Dissertations & Theses, 2021 - 87 p.

Source: Dissertations Abstracts International, Volume: 83-09, Section: B.

Thesis (Master's)--Universidade NOVA de Lisboa (Portugal), 2021.

This item must not be sold to any third party vendors.

A MEMS Gyroscope is a micromachined inertial sensor that can measure the angle of orientation or the angular rate of rotation. These devices have the potential to be used in high precision navigation, safety and consumer electronics applications.Due to their complexity, MEMS Gyroscopes are prone to have imperfections that inhibit their full potential. By deeply characterizing these sensors, it is possible to validate fabrication methodologies, apply control circuit mechanisms, and design alternative mechanical structures that improve the performance.In this project, a streamlined methodology for testing and characterizing these devices is presented and executed. Analysis to the obtained results is given. Aditionally, a prototype circuit was designed to operate the sensors in a closed-loop mode.Two families of gyroscopes with different thickness were characterized - 40 m and 100 m. The devices presented low sensitivity thresholds due to the presence of a large quadrature error. A phase sensitive demodulation solution was provided to eliminate this noise source. The 40 m presented an overall better performance. A Python Script to extract key noise performance parameters was also displayed.

ISBN: 9798209812043Subjects--Topical Terms:

3559205
Receivers & amplifiers.

Characterization Of Mems Coriolis Vibratory Gyroscopes.
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520 $a A MEMS Gyroscope is a micromachined inertial sensor that can measure the angle of orientation or the angular rate of rotation. These devices have the potential to be used in high precision navigation, safety and consumer electronics applications.Due to their complexity, MEMS Gyroscopes are prone to have imperfections that inhibit their full potential. By deeply characterizing these sensors, it is possible to validate fabrication methodologies, apply control circuit mechanisms, and design alternative mechanical structures that improve the performance.In this project, a streamlined methodology for testing and characterizing these devices is presented and executed. Analysis to the obtained results is given. Aditionally, a prototype circuit was designed to operate the sensors in a closed-loop mode.Two families of gyroscopes with different thickness were characterized - 40 m and 100 m. The devices presented low sensitivity thresholds due to the presence of a large quadrature error. A phase sensitive demodulation solution was provided to eliminate this noise source. The 40 m presented an overall better performance. A Python Script to extract key noise performance parameters was also displayed.
520 $a Giroscopios MEMS sao micro sensores inerciais que conseguem medir o angulo de orientacao ou a variacao angular de uma rotacao. Estes dispositivos tem o potencial de ser usados em aplicacoes de alta precisao para sistemas de navegacao, seguranca e para eletronica comercial.Devido a sua complexidade, os Giroscopios MEMS sao propensos a imperfeicoes que inibem o seu potencial maximo. Atraves da caracterizacao extensa destes sensores, e possivel validar as metodologias de fabricacao, aplicar circuitos de controlo e projetar estruturas mecanicas alternativas que melhorem a sua performance.Neste projeto e apresentada uma metodologia substanciada para testar e caracterizar estes dispositivos. Os resultados obtidos foram analisados. Adicionalmente, foi desenhado um prototipo de um circuito que opera os sensores em circuito fechado.Duas familias de giroscopios com diferentes espessuras foram caracterizadas - 40 m e 100 m. Os dispositivos apresentaram baixos graus de sensibilidade devido a uma forte influencia do erro de quadratura. Foi aplicada uma demodulacao sensivel a fase para melhoramento da performance. Um programa em Python para extrair parametros de ruido na resposta e apresentado.
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