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Piezoelectric MEMS Accelerometers for Sensing Ossicular Vibration.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Piezoelectric MEMS Accelerometers for Sensing Ossicular Vibration./
作者:	Hake, Alison E.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2021,
面頁冊數:	112 p.
附註:	Source: Dissertations Abstracts International, Volume: 83-05, Section: B.
Contained By:	Dissertations Abstracts International83-05B.
標題:	Engineering. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28845270
ISBN:	9798471101135

Piezoelectric MEMS Accelerometers for Sensing Ossicular Vibration.
Hake, Alison E.

Piezoelectric MEMS Accelerometers for Sensing Ossicular Vibration. - Ann Arbor : ProQuest Dissertations & Theses, 2021 - 112 p.

Source: Dissertations Abstracts International, Volume: 83-05, Section: B.

Thesis (Ph.D.)--University of Michigan, 2021.

This item must not be sold to any third party vendors.

The structures comprising the human auditory periphery each perform unique functions to direct incoming sound, provide frequency-dependent gain, match impedance between air and liquids, and decompose the signal into its component frequencies. However, conductive and sensorineural hearing loss can significantly inhibit these functions, necessitating intervention to acquire or restore hearing capability. It is important to address an individual's hearing loss to avoid communication difficulties, cognition decline or hindered development, and social isolation. Technological solutions such as hearing aids, cochlear implants, and active middle ear implants have been developed to mitigate hearing loss. Despite the many historical successes of these devices, the externally-placed components still have significant drawbacks that have motivated research and development of completely-implantable sensing options. Not only do they require specific care and removal for certain activities (sleeping, bathing, exercise), but also necessitate signal processing to address feedback, improve microphone directionality, and reduce wind noise. An implanted system could function continuously and would utilize the outer ear for sound localization and protection from wind noise. The performance of implantable sensors must achieve all desired outcomes to outweigh the primary disadvantage - invasive implantation surgery. Therefore, the ultimate goal of this work is to advance completely-implantable auditory prosthesis systems through improved sensing capabilities. In this work, we design a piezoelectric MEMS accelerometer as an ossicular vibration sensor. Piezoelectric sensing offers output linearity, low-noise material options, and the ability to interface the sensor with low-power circuits. To design the sensor, we first derive an analytic model. The analytic solution provides the full frequency response of the piezoelectric beam to physical or electrical stimuli, but it does not readily allow for the observation of trends in the minimum detectable acceleration with dimension parameter changes. Hence, an assumed-mode model is used to obtain a closed-form solution of the minimum detectable acceleration of the sensor. With this model, we have enabled full design space analysis and can assess the influence of each design parameter on this key performance metric. Additionally, fabricated devices were tested experimentally to validate the analytic model. In order to propose a design for this application, we map input sound pressure levels to acceleration values using ossicle vibration data from the literature. Based on hearing thresholds, we then set a minimum detectable acceleration design limit, which can be as low as 0.12 mm/s.

ISBN: 9798471101135Subjects--Topical Terms:

586835
Engineering.
Subjects--Index Terms:

Piezoelectric accelerometer

Piezoelectric MEMS Accelerometers for Sensing Ossicular Vibration.
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020 $a 9798471101135
035 $a (MiAaPQ)AAI28845270
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100 1 $a Hake, Alison E. $3 3681941
245 1 0 $a Piezoelectric MEMS Accelerometers for Sensing Ossicular Vibration.
260 1 $a Ann Arbor : $b ProQuest Dissertations & Theses, $c 2021
300 $a 112 p.
500 $a Source: Dissertations Abstracts International, Volume: 83-05, Section: B.
500 $a Advisor: Grosh, Karl.
502 $a Thesis (Ph.D.)--University of Michigan, 2021.
506 $a This item must not be sold to any third party vendors.
506 $a This item must not be added to any third party search indexes.
520 $a The structures comprising the human auditory periphery each perform unique functions to direct incoming sound, provide frequency-dependent gain, match impedance between air and liquids, and decompose the signal into its component frequencies. However, conductive and sensorineural hearing loss can significantly inhibit these functions, necessitating intervention to acquire or restore hearing capability. It is important to address an individual's hearing loss to avoid communication difficulties, cognition decline or hindered development, and social isolation. Technological solutions such as hearing aids, cochlear implants, and active middle ear implants have been developed to mitigate hearing loss. Despite the many historical successes of these devices, the externally-placed components still have significant drawbacks that have motivated research and development of completely-implantable sensing options. Not only do they require specific care and removal for certain activities (sleeping, bathing, exercise), but also necessitate signal processing to address feedback, improve microphone directionality, and reduce wind noise. An implanted system could function continuously and would utilize the outer ear for sound localization and protection from wind noise. The performance of implantable sensors must achieve all desired outcomes to outweigh the primary disadvantage - invasive implantation surgery. Therefore, the ultimate goal of this work is to advance completely-implantable auditory prosthesis systems through improved sensing capabilities. In this work, we design a piezoelectric MEMS accelerometer as an ossicular vibration sensor. Piezoelectric sensing offers output linearity, low-noise material options, and the ability to interface the sensor with low-power circuits. To design the sensor, we first derive an analytic model. The analytic solution provides the full frequency response of the piezoelectric beam to physical or electrical stimuli, but it does not readily allow for the observation of trends in the minimum detectable acceleration with dimension parameter changes. Hence, an assumed-mode model is used to obtain a closed-form solution of the minimum detectable acceleration of the sensor. With this model, we have enabled full design space analysis and can assess the influence of each design parameter on this key performance metric. Additionally, fabricated devices were tested experimentally to validate the analytic model. In order to propose a design for this application, we map input sound pressure levels to acceleration values using ossicle vibration data from the literature. Based on hearing thresholds, we then set a minimum detectable acceleration design limit, which can be as low as 0.12 mm/s.
520 $a 2. Throughout the historical development of accelerometers for this purpose, the standard device design has a single resonance. However, with insights gained from this work, we conclude that a single-resonance accelerometer cannot meet the minimum detectable signal requirement across the entire frequency range in a small sensor die volume (less than 2.2 mm x 2.2 mm x 0.4 mm). Therefore, we propose a dual-resonant piezoelectric accelerometer design that incorporates two sensing elements, each with its own sensitivity and resonant frequency (i.e. functional bandwidth). This provides the necessary minimum detectable acceleration improvement over the low-frequency range, while the higher-resonance sensor maintains a wide bandwidth (8 kHz). The proposed sensor design can detect 20 phon equivalent acceleration levels from 100 Hz to 8 kHz. Modeled results also indicate that the proposed sensor design maintains a small die area (1.1 mm x 0.74 mm x 0.4 mm). Thus, the proposed design holds the potential to be the best-performing implantable ossicular vibration sensor in the literature.
590 $a School code: 0127.
650 4 $a Engineering. $3 586835
650 4 $a Mechanical engineering. $3 649730
650 4 $a Remote sensing. $3 535394
650 4 $a Electrical engineering. $3 649834
653 $a Piezoelectric accelerometer
653 $a Microelectromechanical systems accelerometer
653 $a Ossicular vibration sensor
653 $a Implantable auditory prosthesis systems
690 $a 0537
690 $a 0548
690 $a 0544
690 $a 0799
710 2 $a University of Michigan. $b Mechanical Engineering. $3 2104815
773 0 $t Dissertations Abstracts International $g 83-05B.
790 $a 0127
791 $a Ph.D.
792 $a 2021
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=28845270