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Modeling and Characterization of Pie...

Roberto, Matthew.

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Modeling and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT).

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Modeling and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT)./
作者:	Roberto, Matthew.
出版者:	Ann Arbor : ProQuest Dissertations & Theses, : 2019,
面頁冊數:	47 p.
附註:	Source: Masters Abstracts International, Volume: 81-04.
Contained By:	Masters Abstracts International81-04.
標題:	Nanotechnology. -
電子資源:	https://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=13897031
ISBN:	9781088301685

Modeling and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT).
Roberto, Matthew.

Modeling and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT). - Ann Arbor : ProQuest Dissertations & Theses, 2019 - 47 p.

Source: Masters Abstracts International, Volume: 81-04.

Thesis (M.S.)--University of California, Davis, 2019.

This item must not be sold to any third party vendors.

In recent years, there has been a rise in the investigation and use of micromachined ultrasonic transducers (MUTs) as a multifunctional, low-power alternative to traditional bulk acoustic resonators (BAW). Utilizing the flexural mode of a thin plate, when subjected to an alternating voltage a MUT can vibrate in the longitudinal direction to transmit and receive pressure waves at frequencies that extend into the MHz range. This thesis presents the fabrication, modeling, and characterization of three various PMUT designs, over a variety of device geometries. Under comparison were devices fabricated using aluminum nitride (AlN), scandium aluminum nitride (Sc¬¬x¬Al¬¬1-xN) (x =36%), and a novel lead zirconate titanate alloy (PZT). These devices were investigated by operation in air over a range of high frequencies (10 kHz - 1MHz). The Butterworth-Van Dyke equivalent circuit model is used to model the performance of the devices and used to fit the acoustic test data. The relevant figures of merit for the transducers are determined via extraction from this model. The geometric dependency of the transducers' figures of merit is determined, and their performance is weighed against one another. Additionally, the contribution of the residual stresses and parasitic capacitances on PMUT performance is examined, and an improved device design is suggested.

ISBN: 9781088301685Subjects--Topical Terms:

526235
Nanotechnology.
Subjects--Index Terms:

Characterization

Modeling and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT).
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