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ULSI front-end technology = covering...

Lau, W. S.

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ULSI front-end technology = covering from the first semiconductor paper to CMOS FINFET technology /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	ULSI front-end technology/ W S Lau.
其他題名:	covering from the first semiconductor paper to CMOS FINFET technology /
作者:	Lau, W. S.
出版者:	Singapore :World Scientific, : c2018.,
面頁冊數:	1 online resource (247 p.) :ill. (some col.)
附註:	Title from PDF title page (viewed September 7, 2017)
標題:	Integrated circuits - Ultra large scale integration. -
電子資源:	http://www.worldscientific.com/worldscibooks/10.1142/10495#t=toc
ISBN:	9789813222168

ULSI front-end technology = covering from the first semiconductor paper to CMOS FINFET technology /
Lau, W. S.

ULSI front-end technologycovering from the first semiconductor paper to CMOS FINFET technology /[electronic resource] :W S Lau. - 1st ed. - Singapore :World Scientific,c2018. - 1 online resource (247 p.) :ill. (some col.)

Title from PDF title page (viewed September 7, 2017)

Includes bibliographical references and index.

"The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book."--Publisher's website.

Electronic reproduction.
Singapore :
World Scientific,
[2017]

Mode of access: World Wide Web.

ISBN: 9789813222168Subjects--Topical Terms:

737745
Integrated circuits
--Ultra large scale integration.

LC Class. No.: TK7874.76 / .L38 2018

Dewey Class. No.: 621.395

ULSI front-end technology = covering from the first semiconductor paper to CMOS FINFET technology /
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