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Proceedings of international confere...

International conference on planarization / CMP technology ((2008 :)

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Proceedings of international conference on planarization/CMP technology 2008 : = theme: Frontier of advanced CMP technology /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Proceedings of international conference on planarization/CMP technology 2008 :/ editor chao-Chang A. Chen, Li-Sheng Hsu.
其他題名:	theme: Frontier of advanced CMP technology /
其他題名:	ICPT 2008.
其他作者:	Chen, Chao-Chang A.
團體作者:	International conference on planarization / CMP technology
出版者:	Hsinchu, Taiwan :Taiwan Society for Abrasive Technology, : c2008.,
面頁冊數:	525, vi p. :ill. ;27 cm.
標題:	Metals - Pickling -
ISBN:	9789868481909

Proceedings of international conference on planarization/CMP technology 2008 : = theme: Frontier of advanced CMP technology /
International conference on planarization / CMP technologyHsinchu, Taiwan)(2008 :

Proceedings of international conference on planarization/CMP technology 2008 :theme: Frontier of advanced CMP technology /ICPT 2008.editor chao-Chang A. Chen, Li-Sheng Hsu. - Hsinchu, Taiwan :Taiwan Society for Abrasive Technology,c2008. - 525, vi p. :ill. ;27 cm.

Includes bibliographical references.

ISBN: 9789868481909Subjects--Topical Terms:

3328473
Metals
--PicklingSubjects--Index Terms:

Poly-Si and duelectric CMP.

LC Class. No.: TK7871 / .I61 2008

Proceedings of international conference on planarization/CMP technology 2008 : = theme: Frontier of advanced CMP technology /
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245 1 0 $a Proceedings of international conference on planarization/CMP technology 2008 : $b theme: Frontier of advanced CMP technology / $c editor chao-Chang A. Chen, Li-Sheng Hsu.
246 3 1 $a ICPT 2008.
246 3 1 $a Frontier of advanced CMP technology.
246 3 1 $a Frontier of advanced Chemical Mechanical Planarization technology.
260 # $a Hsinchu, Taiwan : $b Taiwan Society for Abrasive Technology, $c c2008.
300 $a 525, vi p. : $b ill. ; $c 27 cm.
504 $a Includes bibliographical references.
650 # 0 $a Metals $x Pickling $x Congresses. $3 3328473
650 # 0 $a Semiconductors $x Surfaces $x Congresses. $3 703343
650 # 0 $a Chemical mechanical planarization $x Congresses. $3 3328472
650 # 0 $a Microelectronics $x Materials $x Congresses. $3 669447
650 # 0 $a Grinding and polishing $x Congresses. $3 718720
653 0 # $a Poly-Si and duelectric CMP.
700 1 $a Chen, Chao-Chang A. $3 3328475
700 1 $a Hsu, Li-Sheng. $3 3328476