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Materials and processes for next gen...

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Robinson, Alex,

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Materials and processes for next generation lithography

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Materials and processes for next generation lithography/ edited by Alex Robinson, Richard Lawson.
其他作者:	Robinson, Alex,
出版者:	Amsterdam, Netherlands :Elsevier, : 2016.,
面頁冊數:	1 online resource
標題:	Microlithography. -
電子資源:	http://www.sciencedirect.com/science/book/9780081003541
ISBN:	9780081003541

Materials and processes for next generation lithography
Materials and processes for next generation lithography[electronic resource] /edited by Alex Robinson, Richard Lawson. - Amsterdam, Netherlands :Elsevier,2016. - 1 online resource

ISBN: 9780081003541Subjects--Topical Terms:

890853
Microlithography.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TK7872.M3

Dewey Class. No.: 621.38153

Materials and processes for next generation lithography
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035 $a (OCoLC)ocn962823082
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245 0 0 $a Materials and processes for next generation lithography $h [electronic resource] / $c edited by Alex Robinson, Richard Lawson.
260 $a Amsterdam, Netherlands : $b Elsevier, $c 2016.
300 $a 1 online resource
650 0 $a Microlithography. $3 890853
650 0 $a Photoresists. $3 2179865
655 4 $a Electronic books. $2 lcsh $3 542853
700 1 $a Robinson, Alex, $e editor. $3 3235543
700 1 $a Lawson, Richard, $e editor. $3 3235544
856 4 0 $u http://www.sciencedirect.com/science/book/9780081003541

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