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Nanolithography = the art of fabrica...

Feldman, Martin,

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Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Nanolithography/ edited by Martin Feldman.
其他題名:	the art of fabricating nanoelectronic and nanophotonic devices and systems /
其他作者:	Feldman, Martin,
出版者:	Oxford :Woodhead Publishing, : 2014.,
面頁冊數:	1 online resource (xxiv, 573 p.) :ill.
標題:	Nanolithography. -
電子資源:	http://www.sciencedirect.com/science/book/9780857095008click for full text
ISBN:	9780857095008 (electronic bk.)

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /[electronic resource] :edited by Martin Feldman. - Oxford :Woodhead Publishing,2014. - 1 online resource (xxiv, 573 p.) :ill. - Woodhead Publishing series in electronic and optical materials ;no. 42. - Woodhead Publishing series in electronic and optical materials ;no. 41..

Includes bibliographical references and index.

ISBN: 9780857095008 (electronic bk.)Subjects--Topical Terms:

2198381
Nanolithography.

LC Class. No.: TK7874.843 / .N368 2014

Dewey Class. No.: 621.381531

Nanolithography = the art of fabricating nanoelectronic and nanophotonic devices and systems /
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