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Large-scan-range electrothermal MEMS...

Liu, Lin.

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Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications./
Author:	Liu, Lin.
Description:	165 p.
Notes:	Source: Dissertation Abstracts International, Volume: 75-07(E), Section: B.
Contained By:	Dissertation Abstracts International75-07B(E).
Subject:	Engineering, Electronics and Electrical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3586491
ISBN:	9781303821264

Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications.
Liu, Lin.

Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications. - 165 p.

Source: Dissertation Abstracts International, Volume: 75-07(E), Section: B.

Thesis (Ph.D.)--University of Florida, 2013.

Emerging imaging technologies such as optical coherence tomography (OCT), confocal scanning microscopy (CSM), and nonlinear optical microscopy (NLOM) demonstrate powerful imaging performances and hold great promises to replace conventional biopsy for early cancer diagnosis. To realize in vivo optical imaging and optical biopsy, miniature endoscopy systems must be developed. The major challenges for endoscopic OCT, CSM and NLOM include the miniaturization of optical scan engines for both lateral and axial scans, the requirement of large scan range under low drive voltage, and the miniaturization of optics without largely sacrificing optical performance. This dissertation presents a 2D electrothermal micromirror with through-siliconvias (TSV) that provides large scanning angle (+/- 16°) and fast scanning speed (resonance at 659 Hz) at low voltage (less than 3.6 V). A time-domain endoscopic OCT system using the TSV micromirror for 2D beam scan has been developed. The TSV interconnection together with an ultra-compact probe design reduces the probe size to only 2.6 mm in diameter. A new curved concentric bimorph actuator (CCBA) has been developed to actuate circular micromirrors with improved area efficiency, while achieving large scan range at low drive voltage. Two mirrors based on CCBA actuators have been designed and fabricated. Type I tip-tilt-piston micromirror is capable of scanning "b11"a at 0.6 V, and generating a 227 &fnof;Ym piston displacement at only 0.8 V. Type II piston-only micromirror generates large vertical displacement of about 200 &fnof;Ym at 0.9 V. Multiple designs of electrothermal microlens scanners and focal tunable microlenses driven by such scanners have been developed. The microlens scanners are able to actuate microlenses with large tunable ranges from hundreds of microns to 1 mm at 5 V or lower. Three generations of CSM systems have been developed based on the MEMS focal-tunable microlenses. A 2D CSM using a MEMS focal-tunable microlens for large-tunable-range depth scan and a motor-driven stage for lateral scan has been designed. Then, a free-space 3D CSM using a MEMS focal-tunable microlens for axial scan and a 2D micromirror for lateral scan has been experimentally demonstrated. Last, a fiber-optic 3D confocal scanning endomicroscope with a 3D MEMS scan engine, a high-performance optical system design and a compact endoscopic probe has been developed.

ISBN: 9781303821264Subjects--Topical Terms:

626636
Engineering, Electronics and Electrical.

Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications.
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020 $a 9781303821264
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245 1 0 $a Large-scan-range electrothermal MEMS micromirrors and microlenses and their biomedical imaging applications.
300 $a 165 p.
500 $a Source: Dissertation Abstracts International, Volume: 75-07(E), Section: B.
500 $a Adviser: Huikai Xie.
502 $a Thesis (Ph.D.)--University of Florida, 2013.
520 $a Emerging imaging technologies such as optical coherence tomography (OCT), confocal scanning microscopy (CSM), and nonlinear optical microscopy (NLOM) demonstrate powerful imaging performances and hold great promises to replace conventional biopsy for early cancer diagnosis. To realize in vivo optical imaging and optical biopsy, miniature endoscopy systems must be developed. The major challenges for endoscopic OCT, CSM and NLOM include the miniaturization of optical scan engines for both lateral and axial scans, the requirement of large scan range under low drive voltage, and the miniaturization of optics without largely sacrificing optical performance. This dissertation presents a 2D electrothermal micromirror with through-siliconvias (TSV) that provides large scanning angle (+/- 16°) and fast scanning speed (resonance at 659 Hz) at low voltage (less than 3.6 V). A time-domain endoscopic OCT system using the TSV micromirror for 2D beam scan has been developed. The TSV interconnection together with an ultra-compact probe design reduces the probe size to only 2.6 mm in diameter. A new curved concentric bimorph actuator (CCBA) has been developed to actuate circular micromirrors with improved area efficiency, while achieving large scan range at low drive voltage. Two mirrors based on CCBA actuators have been designed and fabricated. Type I tip-tilt-piston micromirror is capable of scanning "b11"a at 0.6 V, and generating a 227 &fnof;Ym piston displacement at only 0.8 V. Type II piston-only micromirror generates large vertical displacement of about 200 &fnof;Ym at 0.9 V. Multiple designs of electrothermal microlens scanners and focal tunable microlenses driven by such scanners have been developed. The microlens scanners are able to actuate microlenses with large tunable ranges from hundreds of microns to 1 mm at 5 V or lower. Three generations of CSM systems have been developed based on the MEMS focal-tunable microlenses. A 2D CSM using a MEMS focal-tunable microlens for large-tunable-range depth scan and a motor-driven stage for lateral scan has been designed. Then, a free-space 3D CSM using a MEMS focal-tunable microlens for axial scan and a 2D micromirror for lateral scan has been experimentally demonstrated. Last, a fiber-optic 3D confocal scanning endomicroscope with a 3D MEMS scan engine, a high-performance optical system design and a compact endoscopic probe has been developed.
590 $a School code: 0070.
650 4 $a Engineering, Electronics and Electrical. $3 626636
650 4 $a Engineering, Biomedical. $3 1017684
690 $a 0544
690 $a 0541
710 2 $a University of Florida. $3 718949
773 0 $t Dissertation Abstracts International $g 75-07B(E).
790 $a 0070
791 $a Ph.D.
792 $a 2013
793 $a English
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3586491