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Periodic metallic nanostructures fab...
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Li, Wei.
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Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system./
作者:
Li, Wei.
面頁冊數:
71 p.
附註:
Source: Masters Abstracts International, Volume: 52-02.
Contained By:
Masters Abstracts International52-02(E).
標題:
Engineering, Electronics and Electrical. -
電子資源:
http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=1544799
ISBN:
9781303361500
Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
Li, Wei.
Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
- 71 p.
Source: Masters Abstracts International, Volume: 52-02.
Thesis (M.S.)--Colorado State University, 2013.
This thesis describes a novel technique of extreme ultraviolet (EUV) lithography. A compact nanofabrication system that combines Talbot lithography and a table top extreme ultraviolet laser illumination is presented. The lithographic method based on the Talbot effect provides a robust and simple experimental setup that is capable to print arbitrary periodic structures over millimeter square areas free of defects. Test structures were printed and metalized by ion beam etching system which was rebuilt and calibrated as part of this work. The results demonstrate that a complete coherent extreme ultraviolet lithographic process based on a table top system has the capability to fabricate functional periodic metallic nanostructures. Preliminary results and prospects for future work are also presented at the end of this thesis.
ISBN: 9781303361500Subjects--Topical Terms:
626636
Engineering, Electronics and Electrical.
Periodic metallic nanostructures fabricated by coherent Talbot lithography in a table top system.
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