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Thin film materials technology DUP_1...

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Wasa, Kiyotaka.

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Thin film materials technology DUP_1 = sputtering of compound materials /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Thin film materials technology DUP_1/ by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
其他題名:	sputtering of compound materials /
作者:	Wasa, Kiyotaka.
其他作者:	Kitabatake, Makoto.
出版者:	Norwich, NY :William Andrew Pub. ; : c2004.,
面頁冊數:	xiv, 518 p. :ill. ;24 cm.
標題:	Cathode sputtering (Plating process) -
電子資源:	http://www.sciencedirect.com/science/book/9780815514831
ISBN:	9780815514831 (electronic bk.)

Thin film materials technology DUP_1 = sputtering of compound materials /
Wasa, Kiyotaka.

Thin film materials technology DUP_1sputtering of compound materials /[electronic resource] :by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. - Norwich, NY :William Andrew Pub. ;c2004. - xiv, 518 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780815514831 (electronic bk.)

LCCN: 2003018016Subjects--Topical Terms:

712122
Cathode sputtering (Plating process)

LC Class. No.: TS695 / .W38 2004

Dewey Class. No.: 621.3815/2

Thin film materials technology DUP_1 = sputtering of compound materials /
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008 140108s2004 nyua sb 001 0 eng
010 $a 2003018016
020 $a 9780815514831 (electronic bk.)
020 $a 9780815514831
035 $a 13000340
040 $a DLC $c DLC $d DLC $d DLC
041 0 $a eng
042 $a pcc
050 0 0 $a TS695 $b .W38 2004
082 0 0 $a 621.3815/2 $2 22
100 1 $a Wasa, Kiyotaka. $3 1638545
245 1 0 $a Thin film materials technology DUP_1 $h [electronic resource] : $b sputtering of compound materials / $c by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
260 $a Norwich, NY : $b William Andrew Pub. ; $a Heidelberg : $b Springer, $c c2004.
300 $a xiv, 518 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Cathode sputtering (Plating process) $3 712122
650 0 $a Thin films. $3 626403
700 1 $a Kitabatake, Makoto. $3 1642219
700 1 $a Adachi, Hideaki. $3 1642220
856 4 0 $u http://www.sciencedirect.com/science/book/9780815514831

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