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Handbook of sputter deposition techn...

Wasa, Kiyotaka.

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Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Handbook of sputter deposition technology/ edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
其他題名:	fundamentals and applications for functional thin films, nano-materials and MEMS /
其他作者:	Wasa, Kiyotaka.
出版者:	Waltham, MA :William Andrew, : 2012.,
面頁冊數:	xii, 644 p. :ill. ;24 cm.
標題:	Cathode sputtering (Plating process) -
電子資源:	http://www.sciencedirect.com/science/book/9781437734836
ISBN:	9781437734836 (electronic bk.)

Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /
Handbook of sputter deposition technologyfundamentals and applications for functional thin films, nano-materials and MEMS /[electronic resource] :edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. - 2nd ed. - Waltham, MA :William Andrew,2012. - xii, 644 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9781437734836 (electronic bk.) Subjects--Topical Terms:

712122
Cathode sputtering (Plating process)

LC Class. No.: TS695 / .W37 2012

Dewey Class. No.: 671.7/38

Handbook of sputter deposition technology = fundamentals and applications for functional thin films, nano-materials and MEMS /
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245 0 0 $a Handbook of sputter deposition technology $h [electronic resource] : $b fundamentals and applications for functional thin films, nano-materials and MEMS / $c edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera.
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700 1 $a Kotera, Hidetoshi. $3 1638547
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