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Plasma physics in pulsed laser depos...

Haverkamp, Jason Dirk.

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Plasma physics in pulsed laser deposition of hydrogen-free diamond-like carbon films and nanocomposites.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Plasma physics in pulsed laser deposition of hydrogen-free diamond-like carbon films and nanocomposites./
作者:	Haverkamp, Jason Dirk.
面頁冊數:	130 p.
附註:	Source: Dissertation Abstracts International, Volume: 65-04, Section: B, page: 2069.
Contained By:	Dissertation Abstracts International65-04B.
標題:	Engineering, Nuclear. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3128763
ISBN:	0496760254

Plasma physics in pulsed laser deposition of hydrogen-free diamond-like carbon films and nanocomposites.
Haverkamp, Jason Dirk.

Plasma physics in pulsed laser deposition of hydrogen-free diamond-like carbon films and nanocomposites. - 130 p.

Source: Dissertation Abstracts International, Volume: 65-04, Section: B, page: 2069.

Thesis (Ph.D.)--North Carolina State University, 2004.

This dissertation focuses on the analysis of the plasma plume created in pulsed laser ablation thin film deposition of diamond-like carbon and the correlation of the characteristics of the plume to thin film properties. Diamond-like carbon films were deposited on silicon substrates by pulsed laser deposition at different laser energy densities. Important plasma parameters, such as ion kinetic energy, ion density, and electron temperature are altered by changing the laser energy density. These plasma properties determine the coordination states of carbon atoms within the deposited film. The diamond-like and graphite-like coordination states of carbon, termed sp3 and sp2, respectively, determine film properties such as hardness, optical properties, and electronic properties.

ISBN: 0496760254Subjects--Topical Terms:

1043651
Engineering, Nuclear.

Plasma physics in pulsed laser deposition of hydrogen-free diamond-like carbon films and nanocomposites.
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245 1 0 $a Plasma physics in pulsed laser deposition of hydrogen-free diamond-like carbon films and nanocomposites.
300 $a 130 p.
500 $a Source: Dissertation Abstracts International, Volume: 65-04, Section: B, page: 2069.
500 $a Directors: Jagdish Narayan; Mohamed A. Bourham.
502 $a Thesis (Ph.D.)--North Carolina State University, 2004.
520 $a This dissertation focuses on the analysis of the plasma plume created in pulsed laser ablation thin film deposition of diamond-like carbon and the correlation of the characteristics of the plume to thin film properties. Diamond-like carbon films were deposited on silicon substrates by pulsed laser deposition at different laser energy densities. Important plasma parameters, such as ion kinetic energy, ion density, and electron temperature are altered by changing the laser energy density. These plasma properties determine the coordination states of carbon atoms within the deposited film. The diamond-like and graphite-like coordination states of carbon, termed sp3 and sp2, respectively, determine film properties such as hardness, optical properties, and electronic properties.
520 $a The sp3 fraction of the diamond-like carbon was directly determined through electron energy loss spectroscopy. The microstructure of the sp2 coordinated carbon was determined with visible Raman spectroscopy. Plasma properties were analyzed by quadruple Langmuir probes and mass loss measurements. Langmuir probe measurements indicate that ion density, ion flow speed, and electron temperature increase with laser energy density. Mass loss measurements show that the plume has an ionization fraction between 5 and 10 percent. Therefore, neutral particles have a significant role in film growth. Current models for the growth of diamond-like carbon films are reviewed. A deposition model based on electronic excitation is proposed. The probability of surpassing the energy barrier between sp2 and sp 3 coordination is increased via an effective reduction of the activation barrier due to electronic excitation. The energy for electronic excitation is supplied by electron and photon interactions with ions and neutrals in the plume, as well as recombination of ions at the surface.
520 $a To investigate the effect of magnetic fields on plasma properties and film growth, a strong magnetic field was placed perpendicular to the direction of plasma flow. Plasma flow speed, electron temperature, and ion density were studied with quadruple Langmuir probes. Magnetic probes investigated the interaction between the flowing plasma and the external magnetic field. A correction for the influence of the magnetic field on the collection of electrons by the quadruple Langmuir probe was derived. Plasma flow speed was reduced due to interaction with the magnetic field. (Abstract shortened by UMI.)
590 $a School code: 0155.
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650 4 $a Engineering, Materials Science. $3 1017759
650 4 $a Physics, Fluid and Plasma. $3 1018402
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710 2 0 $a North Carolina State University. $3 1018772
773 0 $t Dissertation Abstracts International $g 65-04B.
790 1 0 $a Narayan, Jagdish, $e advisor
790 1 0 $a Bourham, Mohamed A., $e advisor
790 $a 0155
791 $a Ph.D.
792 $a 2004
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