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賴忠信
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Titles
磁控濺鍍法製備閘極氧化層之釓-銦-氧薄膜研究 = = Magnetron Sputtering Gd-In-O Films for Gate Dielectrics of MOS Devices /
by: 賴忠信
(Language materials, printed)
Subjects
釓銦氧
射頻磁控濺鍍法
高介電常數
金氧半
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