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  • Handbook of emerging materials for semiconductor industry
  • Record Type: Electronic resources : Monograph/item
    Title/Author: Handbook of emerging materials for semiconductor industry/ edited by Young Suh Song ... [et al.].
    other author: Song, Young Suh.
    Published: Singapore :Springer Nature Singapore : : 2024.,
    Description: xxi, 938 p. :ill. (chiefly col.), digital ;24 cm.
    [NT 15003449]: Introduction to Recent Emerging Materials -- Discovery of Emerging Nanomaterials -- Carbon-based Nanomaterials: Graphite, Graphene, Carbon Nanotube (CNT) -- Metamaterials -- Perovskite Materials -- Insulators and High-k Materials -- Silicon and IV-Group Molecules -- Thermal Function of Nanomaterials -- Mechanical Function of Nanomaterials -- Electrical/Electronic Function of Nanomaterials -- Optical Function of Nanomaterials -- The Other Functions of Nanomaterials -- Introduction to Latest Fabrication Techniques -- Oxidation -- Molecular Layer Growth - CVD, ALD, Epitaxy -- Lithography - E-beam, EUV, NIL -- Ion-Implantation -- Metal Deposition -- AI-driven Design Techniques for Emerging Materials -- Multi-wafer Process.
    Contained By: Springer Nature eReference
    Subject: Semiconductors - Materials. -
    Online resource: https://doi.org/10.1007/978-981-99-6649-3
    ISBN: 9789819966493
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