Thin film devices - Design and construction.
Overview
Works: | 6 works in 3 publications in 3 languages |
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Titles
Handbook of thin film deposition = techniques, processes, and technologies /
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(Electronic resources)
PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /
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(Electronic resources)
Chemical solution synthesis for materials design and thin film device applications
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(Electronic resources)