東華大學圖書館 |

語系: 繁體中文

登入

回首頁

切換: 標籤 | MARC模式 | ISBD

PVD for microelectronics = sputter d...

Powell, Ronald A.

FindBook

Amazon

博客來

PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	PVD for microelectronics/ Ronald A. Powell, Stephen M. Rossnagel.
其他題名:	sputter deposition applied to semiconductor manufacturing /
作者:	Powell, Ronald A.
其他作者:	Rossnagel, Stephen M.
出版者:	San Diego :Academic Press, : c1999.,
面頁冊數:	xiii, 419 p. :ill. ;24 cm.
標題:	Thin film devices - Design and construction. -
電子資源:	http://www.sciencedirect.com/science/book/9780125330268
ISBN:	9780125330268 (electronic bk.)

PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /
Powell, Ronald A.

PVD for microelectronicssputter deposition applied to semiconductor manufacturing /[electronic resource] :Ronald A. Powell, Stephen M. Rossnagel. - San Diego :Academic Press,c1999. - xiii, 419 p. :ill. ;24 cm. - Thin films ;v. 26 . - Thin films (San Diego, Calif.) ;v. 27..

Includes bibliographical references and indexes.

ISBN: 9780125330268 (electronic bk.) Subjects--Topical Terms:

717986
Thin film devices
--Design and construction.

LC Class. No.: QC176.A1 / P53 v.26

Dewey Class. No.: 621.3815/2

PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /
LDR:00765cmm a2200205 a 4500 001 1951918
005 20130417161641.0
008 150102s1999 caua sb 001 0 eng
020 $a 9780125330268 (electronic bk.)
020 $a 9780125330268
035 $a 13003241
040 $a DLC $c DLC $d C#P $d UBA $d BGU
041 0 $a eng
050 4 $a QC176.A1 $b P53 v.26
082 0 0 $a 621.3815/2 $2 21
100 1 $a Powell, Ronald A. $3 703387
245 1 0 $a PVD for microelectronics $h [electronic resource] : $b sputter deposition applied to semiconductor manufacturing / $c Ronald A. Powell, Stephen M. Rossnagel.
260 $a San Diego : $b Academic Press, $c c1999.
300 $a xiii, 419 p. : $b ill. ; $c 24 cm.
490 1 $a Thin films ; $v v. 26
504 $a Includes bibliographical references and indexes.
650 0 $a Thin film devices $x Design and construction. $3 717986
650 0 $a Vapor-plating. $3 717983
650 0 $a Thin films. $3 626403
700 1 $a Rossnagel, Stephen M. $3 1639724
830 0 $a Thin films (San Diego, Calif.) ; $v v. 27. $3 1613636
856 4 0 $u http://www.sciencedirect.com/science/book/9780125330268