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Development of a surface micromachin...

Kilani, Mohammad Ibrahim.

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Development of a surface micromachined spiral-channel viscous pump.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Development of a surface micromachined spiral-channel viscous pump./
作者:	Kilani, Mohammad Ibrahim.
面頁冊數:	241 p.
附註:	Major Professor: Yousef Haik.
Contained By:	Dissertation Abstracts International63-05B
標題:	Engineering, Electronics and Electrical -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3055758
ISBN:	0493704566

Development of a surface micromachined spiral-channel viscous pump.
Kilani, Mohammad Ibrahim.

Development of a surface micromachined spiral-channel viscous pump. - 241 p.

Major Professor: Yousef Haik.

Thesis (Ph.D.)--The Florida State University, 2002.

This work introduces a new pump, called the spiral pump, which targets the surface micromachining technology. We demonstrate the possibility of realizing the spiral pump geometry in standard surface micromachining, lay out the theoretical foundation for its operation, and conduct an objective assessment for its practicality.

ISBN: 0493704566Subjects--Topical Terms:

1260285
Engineering, Electronics and Electrical

Development of a surface micromachined spiral-channel viscous pump.
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100 1 $a Kilani, Mohammad Ibrahim. $3 1260445
245 1 0 $a Development of a surface micromachined spiral-channel viscous pump.
300 $a 241 p.
500 $a Major Professor: Yousef Haik.
500 $a Source: Dissertation Abstracts International, Volume: 63-05, Section: B, page: 2549.
502 $a Thesis (Ph.D.)--The Florida State University, 2002.
520 $a This work introduces a new pump, called the spiral pump, which targets the surface micromachining technology. We demonstrate the possibility of realizing the spiral pump geometry in standard surface micromachining, lay out the theoretical foundation for its operation, and conduct an objective assessment for its practicality.
520 $a The spiral pump is a shear-driven viscous pump, which works by rotating a disk with a spiral groove at a close proximity over a stationary plate. Fluid contained in the spiral groove between the stationary plate and the rotating disk, is subject to a net tangential viscous stress, which allows it to be transported against an imposed pressure difference. A number of spiral pumps were fabricated in 5 levels of polysilicon using Sandia's Ultraplanar Multilevel Surface Micromachining Technology, SUMMiT, and the fabricated micropump were tested in dry-run mode using electrostatic probing and optical microscopy.
520 $a To achieve a more comprehensive understanding of the spiral micropump operation, an analytical model was developed for the flow field in the spiral channel of the pump using an approximation which replaces the spiral channel with an equivalent straight channel with appropriate dimensions and boundary conditions. An analytical solution for this model at the lubrication limit relates the flow rate, torque and power consumption of the spiral pump to the pressure difference and rotation rate. The model was validated using macroscale experiments conducted on a scaled up spiral pump model, which involved a quantitative characterization of the spiral pump performance. Those experiments validate the developed theory and help assess the practicality of the spiral pump concept
520 $a In addition to the spiral pump, two positive-displacement ring-gear pumps were designed and fabricated in this work. The feasibility of surface micromachined ring-gear pumps is briefly investigated in this work, and compare to that of the spiral micropump
590 $a School code: 0071
650 $a Engineering, Electronics and Electrical $3 1260285
650 $a Engineering, Mechanical $3 1260257
650 $a Physics, Fluid and Plasma $3 1260447
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