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A geometrically nonlinear stress-def...

Masters, Christine Beisler.

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A geometrically nonlinear stress-deflection relation for thin film/substrate systems.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	A geometrically nonlinear stress-deflection relation for thin film/substrate systems./
Author:	Masters, Christine Beisler.
Description:	161 p.
Notes:	Adviser: N. J. Salamon.
Contained By:	Dissertation Abstracts International53-05B.
Subject:	Applied Mechanics. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9226743

A geometrically nonlinear stress-deflection relation for thin film/substrate systems.
Masters, Christine Beisler.

A geometrically nonlinear stress-deflection relation for thin film/substrate systems. - 161 p.

Adviser: N. J. Salamon.

Thesis (Ph.D.)--The Pennsylvania State University, 1992.

Most thin films develop some type of intrinsic stress as they are deposited onto a substrate. If the substrate is flexible, this stress will cause the system to deflect. In the beam or plate bending technique for measuring intrinsic film stress, this deflection is measured and typically, a linear relation is used to relate the deflection back to the intrinsic stress in the film. However, as deflections become large, geometrically nonlinear effects become significant and a nonlinear relation must be used to calculate intrinsic film stress.Subjects--Topical Terms:

1018410
Applied Mechanics.

A geometrically nonlinear stress-deflection relation for thin film/substrate systems.
LDR:03296nam 2200289 a 45 001 928328
005 20110426
008 110426s1992 eng d
035 $a (UnM)AAI9226743
035 $a AAI9226743
040 $a UnM $c UnM
100 1 $a Masters, Christine Beisler. $3 1251789
245 1 0 $a A geometrically nonlinear stress-deflection relation for thin film/substrate systems.
300 $a 161 p.
500 $a Adviser: N. J. Salamon.
500 $a Source: Dissertation Abstracts International, Volume: 53-05, Section: B, page: 2394.
502 $a Thesis (Ph.D.)--The Pennsylvania State University, 1992.
520 $a Most thin films develop some type of intrinsic stress as they are deposited onto a substrate. If the substrate is flexible, this stress will cause the system to deflect. In the beam or plate bending technique for measuring intrinsic film stress, this deflection is measured and typically, a linear relation is used to relate the deflection back to the intrinsic stress in the film. However, as deflections become large, geometrically nonlinear effects become significant and a nonlinear relation must be used to calculate intrinsic film stress.
520 $a In this research, the film/substrate is modeled as a composite plate, using several polynomials with unknown coefficients to approximate the out-of-plane deflections and midplane normal strains. Using these approximations with the partially nonlinear strain-displacement relations produces an algebraic equation for the strain energy in the composite film/substrate system. Minimizing this strain energy produces several plate deflection configurations. In an isotropic system, at very low intrinsic film stresses, a single, stable, spherical plate configuration is predicted. However, as the intrinsic film stress increases the theoretical solution bifurcates, predicting one unstable spherical shape and two stable ellipsoidal shapes. In the limit as the intrinsic film stress approaches infinity, the ellipsoidal configurations develop into cylindrical plate curvatures about either one of the two axes.
520 $a When deflections become larger than half the thickness of the combined film and substrate, the relative error between the linear and nonlinear stress calculation exceeds 10% and this error continues to increase as deflections increase. Approximating the out-of-plane deflections with a 2$\sp{\rm nd}$ order polynomial and each of the midplane normal strains with a 6$\sp{\rm th}$ order polynomial while applying the constraint (based on conventional plate theory boundary conditions) that the midplane shear strain be zero at the free edges, plate deflections are predicted which show good correlation with a fully nonlinear finite element analysis of the film/substrate system. This indicates that, although simplifying assumptions were made in the theoretical development, the final nonlinear stress deflection relation can confidently be used to model the nonlinear behavior occurring in thin film/substrate systems when deflections are large.
590 $a School code: 0176.
650 4 $a Applied Mechanics. $3 1018410
650 4 $a Engineering, Materials Science. $3 1017759
690 $a 0346
690 $a 0794
710 2 0 $a The Pennsylvania State University. $3 699896
773 0 $t Dissertation Abstracts International $g 53-05B.
790 $a 0176
790 1 0 $a Salamon, N. J., $e advisor
791 $a Ph.D.
792 $a 1992
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9226743