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Rare-earth implanted MOS devices for...

Rebohle, Lars.

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Rare-earth implanted MOS devices for silicon photonics = microstructural, electrical and optoelectronic properties /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Rare-earth implanted MOS devices for silicon photonics/ by Lars Rebohle, Wolfgang Skorupa.
其他題名:	microstructural, electrical and optoelectronic properties /
作者:	Rebohle, Lars.
其他作者:	Skorupa, Wolfgang.
出版者:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2010.,
面頁冊數:	xviii, 173 p. :ill., digital ;24 cm.
叢書名:	Springer series in materials science,
Contained By:	Springer eBooks
標題:	Metal oxide semiconductors. -
電子資源:	http://dx.doi.org/10.1007/978-3-642-14447-9
ISBN:	9783642144462 (paper)

Rare-earth implanted MOS devices for silicon photonics = microstructural, electrical and optoelectronic properties /
Rebohle, Lars.

Rare-earth implanted MOS devices for silicon photonicsmicrostructural, electrical and optoelectronic properties /[electronic resource] :by Lars Rebohle, Wolfgang Skorupa. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2010. - xviii, 173 p. :ill., digital ;24 cm. - Springer series in materials science,1420933-033X ;.

ISBN: 9783642144462 (paper)Subjects--Topical Terms:

649541
Metal oxide semiconductors.

LC Class. No.: TK7871.99.M44 / R37 2010

Dewey Class. No.: 621.39732

Rare-earth implanted MOS devices for silicon photonics = microstructural, electrical and optoelectronic properties /
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