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Advanced materials and technologies ...

Dideikin, Arthur.

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Advanced materials and technologies for micro/nano-devices, sensors and actuators

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Advanced materials and technologies for micro/nano-devices, sensors and actuators/ edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
其他作者:	Dideikin, Arthur.
出版者:	Dordrecht :Springer Science+Business Media B.V., : 2010.,
面頁冊數:	322 p. :ill. (some col.), digital ;24 cm.
叢書名:	NATO Science for Peace and Security Series B : Physics and Biophysics,
Contained By:	Springer eBooks
標題:	Microelectromechanical systems - Design and construction. -
電子資源:	http://dx.doi.org/10.1007/978-90-481-3807-4
ISBN:	9789048138050 (paper)

Advanced materials and technologies for micro/nano-devices, sensors and actuators
Advanced materials and technologies for micro/nano-devices, sensors and actuators[electronic resource] /edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. - Dordrecht :Springer Science+Business Media B.V.,2010. - 322 p. :ill. (some col.), digital ;24 cm. - NATO Science for Peace and Security Series B : Physics and Biophysics,1874-6500.

ISBN: 9789048138050 (paper)Subjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

Dewey Class. No.: 621.381

Advanced materials and technologies for micro/nano-devices, sensors and actuators
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