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Block copolymer templated patterning...

University of Alberta (Canada).

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Block copolymer templated patterning of silicon surfaces and their applications.

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Block copolymer templated patterning of silicon surfaces and their applications./
作者:	Qiao, Yinghong.
面頁冊數:	137 p.
附註:	Source: Dissertation Abstracts International, Volume: 70-02, Section: B, page: 1064.
Contained By:	Dissertation Abstracts International70-02B.
標題:	Chemistry, Analytical. -
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=NR46406
ISBN:	9780494464069

Block copolymer templated patterning of silicon surfaces and their applications.
Qiao, Yinghong.

Block copolymer templated patterning of silicon surfaces and their applications. - 137 p.

Source: Dissertation Abstracts International, Volume: 70-02, Section: B, page: 1064.

Thesis (Ph.D.)--University of Alberta (Canada), 2008.

The use of self-assembled polymer structures to direct the formation of mesoscopic (1-100 nm) features on silicon could provide a fabrication-compatible means to produce nanoscale patterns on silicon, supplementing conventional lithographic techniques. In the beginning of this thesis, we demonstrate nanoscale etching of silicon, using standard aqueous-based fluoride etchants, to produce three dimensional nanoscale features. The amphiphilic block copolymers, polystyrene- block-poly(4-vinyl pyridine), denoted as PS-b-P4VP with different molecular weights, serve to direct the silicon surface chemistry by controlling the spatial location of the reaction, as well as concentration of reagents. Controllable shapes, sizes, average spacing, and chemical functionalities of the patterned nanostructures are obtained through the modulation of the experimental conditions, such as crystallographic orientation of the used silicon wafer, concentration of the etchant, etching time, et al. This etching method is not limited exclusively to flat surfaces: patterning on curved surfaces through the same etching recipe is also demonstrated in the thesis.

ISBN: 9780494464069Subjects--Topical Terms:

586156
Chemistry, Analytical.

Block copolymer templated patterning of silicon surfaces and their applications.
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500 $a Source: Dissertation Abstracts International, Volume: 70-02, Section: B, page: 1064.
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520 $a The use of self-assembled polymer structures to direct the formation of mesoscopic (1-100 nm) features on silicon could provide a fabrication-compatible means to produce nanoscale patterns on silicon, supplementing conventional lithographic techniques. In the beginning of this thesis, we demonstrate nanoscale etching of silicon, using standard aqueous-based fluoride etchants, to produce three dimensional nanoscale features. The amphiphilic block copolymers, polystyrene- block-poly(4-vinyl pyridine), denoted as PS-b-P4VP with different molecular weights, serve to direct the silicon surface chemistry by controlling the spatial location of the reaction, as well as concentration of reagents. Controllable shapes, sizes, average spacing, and chemical functionalities of the patterned nanostructures are obtained through the modulation of the experimental conditions, such as crystallographic orientation of the used silicon wafer, concentration of the etchant, etching time, et al. This etching method is not limited exclusively to flat surfaces: patterning on curved surfaces through the same etching recipe is also demonstrated in the thesis.
520 $a One unique feature of the patterned silicon surface is that the interiors of etch pits are hydride terminated, while the exteriors of the etched structures remain covered by the native oxide. The interiors of the resulting etch pits can be selectively functionalized with organic monolayers, metal nanoparticles, and other materials, leading to ordered arrays on silicon. In the second part of this thesis, we demonstrate the construction of metal nanoparticle arrays with a controlled spatial distribution on surfaces, utilizing both galvanic displacement and hydrosilylation reactions on hydride-terminated silicon surfaces by taking advantage of the distinct functionalities between the etch pit interior and the flat top surface, hydride versus oxide.
520 $a As one of many possibilities, we also demonstrate in this thesis the fabrication of ordered arrays of gold nanoparticle aggregations on this nanopatterned surface. The interiors of etch pits are functionalized with an alpha,o-mercaptoalkene to "capture" gold colloids into the etch pits. Due to the spatial restriction of the etch pits, controlled aggregation behaviours were achieved for nanoparticles of different sizes. The nanoparticle arrays display aggregation-dependent surface enhanced Raman scattering effects. The nanoparticle arrays with controllable aggregations are expected to be useful for trace biological and chemical analysis.
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