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IEEE transactions on semiconductor m...

IEEE Components, Hybrids, and Manufacturing Technology Society.

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IEEE transactions on semiconductor manufacturing : = a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.

Record Type:	Language materials, printed : Serial
Title/Author:	IEEE transactions on semiconductor manufacturing :/
Reminder of title:	a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
remainder title:	Semiconductor manufacturing.
Published:	New York, N.Y. :Institute of Electrical and Electronics Engineers, : c1988-,
Description:	v. :ill. ;28 cm.
Notes:	Title from cover.
serial volume memo:	Quarterly.
Subject:	Semiconductors - Design and construction -
ISSN:	0894-6507

IEEE transactions on semiconductor manufacturing : = a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
IEEE transactions on semiconductor manufacturing :a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.Semiconductor manufacturing. - New York, N.Y. :Institute of Electrical and Electronics Engineers,c1988- - v. :ill. ;28 cm. - Quarterly. - Vol. 1, no. 1 (Feb. 1988)-

Title from cover.

ISSN: 0894-6507 = IEEE transactions on semiconductor manufacturing. = IEEE trans. semicond. manuf.

CODEN: ITSMED

LCCN: 88659341 Subjects--Topical Terms:

958822
Semiconductors
--Design and constructionIndex Terms--Genre/Form:

645735
Electronic journals

LC Class. No.: TK7836 / .I39

Dewey Class. No.: 621.3815/2

IEEE transactions on semiconductor manufacturing : = a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
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222 0 $a IEEE transactions on semiconductor manufacturing.
245 0 0 $a IEEE transactions on semiconductor manufacturing : $b a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.
246 1 0 $a Semiconductor manufacturing.
246 1 0 $a Transactions on semiconductor manufacturing.
260 # $a New York, N.Y. : $c c1988- $b Institute of Electrical and Electronics Engineers,
265 $a IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331.
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