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Materials science of thin films = de...
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Materials science of thin films = deposition and structure /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Materials science of thin films/ Milton Ohring.
其他題名:
deposition and structure /
作者:
Ohring, Milton,
出版者:
San Diego, CA :Academic Press, : 2002.,
面頁冊數:
xxi, 794 p. :ill.
內容註:
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
標題:
Thin films. -
電子資源:
http://www.netLibrary.com/urlapi.asp?action=summary&v=1&bookid=92177An electronic book accessible through the World Wide Web; click for information
ISBN:
0585470979 (electronic bk.)
Materials science of thin films = deposition and structure /
Ohring, Milton,1936-
Materials science of thin films
deposition and structure /[electronic resource] :Milton Ohring. - 2nd ed. - San Diego, CA :Academic Press,2002. - xxi, 794 p. :ill.
Includes bibliographical references and index.
A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2003.
Available via World Wide Web.
ISBN: 0585470979 (electronic bk.)Subjects--Topical Terms:
626403
Thin films.
Index Terms--Genre/Form:
542853
Electronic books.
LC Class. No.: TA418.9.T45 / O47 2002eb
Dewey Class. No.: 621.3815/2
Materials science of thin films = deposition and structure /
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