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Beam technologies for integrated processing = report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Record Type:	Electronic resources : Monograph/item
Title/Author:	Beam technologies for integrated processing/
Reminder of title:	report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Corporate Body:	National Research Council (U.S.).
Published:	Washington, D.C. :National Academy Press, : 1992.,
Description:	xii, 89 p. :ill. ;28 cm.
Notes:	"NMAB-461."
Subject:	Microelectronics industry. -
Online resource:	https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=14749An electronic book accessible through the World Wide Web; click for information
ISBN:	0585149453 (electronic bk.)

Beam technologies for integrated processing = report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
National Research Council (U.S.).Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.

Beam technologies for integrated processingreport of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.[electronic resource] : - Washington, D.C. :National Academy Press,1992. - xii, 89 p. :ill. ;28 cm.

"NMAB-461."

Includes bibliographical references.

Electronic reproduction.
Boulder, Colo. :
NetLibrary,
2000.

Available via the World Wide Web.

ISBN: 0585149453 (electronic bk.)Subjects--Topical Terms:

763086
Microelectronics industry.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: TK7836 / .N37 1992eb

Dewey Class. No.: 621.381

Beam technologies for integrated processing = report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
LDR:01301cmm a2200265 a 45 001 716395
003 OCoLC
005 20070624
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007 cr cn-
008 250516s1992 dcua sb 000 0 eng d
020 $a 0585149453 (electronic bk.)
035 $a ocm44965115
035 $a 716395
040 $a N $c N $d OCL $d OCLCQ
049 $a AMFA
050 1 4 $a TK7836 $b .N37 1992eb
082 0 4 $a 621.381 $2 20
110 $a National Research Council (U.S.). $b Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. $3 786461
245 1 0 $a Beam technologies for integrated processing $h [electronic resource] : $b report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
260 $a Washington, D.C. : $c 1992. $b National Academy Press,
300 $a xii, 89 p. : $b ill. ; $c 28 cm.
500 $a "NMAB-461."
504 $a Includes bibliographical references.
533 $a Electronic reproduction. $b Boulder, Colo. : $c NetLibrary, $d 2000. $n Available via the World Wide Web. $n Available in multiple electronic file formats. $n Access may be limited to NetLibrary affiliated libraries.
650 $a Microelectronics industry. $3 763086
650 $a Microelectronics $x Materials. $3 656983
650 $a Molecular beams $x Industrial applications. $3 786462
650 $a Plasma-enhanced chemical vapor deposition $x Industrial applications. $3 786463
655 $a Electronic books. $2 lcsh $3 542853
710 $a NetLibrary, Inc. $3 542851
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994 $a 92 $b AMF