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Chemical physics of thin film deposi...

Pauleau, Y.

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Chemical physics of thin film deposition processes for micro- and nano-technologies /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Chemical physics of thin film deposition processes for micro- and nano-technologies // edited by Yves Pauleau.
其他作者:	Pauleau, Y.
出版者:	Dordrecht ;Kluwer Academic Publishers, : c2002.,
面頁冊數:	xiii, 363 p. :ill. ;25 cm.
附註:	"Published in cooperation with NATO Scientific Affairs Division."
叢書名:	NATO science series.
標題:	Nanotechnology - Congresses. -
ISBN:	1402005245 :

Chemical physics of thin film deposition processes for micro- and nano-technologies /
Chemical physics of thin film deposition processes for micro- and nano-technologies /edited by Yves Pauleau. - Dordrecht ;Kluwer Academic Publishers,c2002. - xiii, 363 p. :ill. ;25 cm. - NATO science series.Series II,Mathematics, physics, and chemistry ;v. 55.

"Published in cooperation with NATO Scientific Affairs Division."

Includes bibliographical references and index.

ISBN: 1402005245 :NT5048

LCCN: 2002072962Subjects--Topical Terms:

536292
Nanotechnology
--Congresses.

LC Class. No.: TA418.9.T45 / C47 2002

Dewey Class. No.: 621.3815/2

Chemical physics of thin film deposition processes for micro- and nano-technologies /
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245 0 0 $a Chemical physics of thin film deposition processes for micro- and nano-technologies / $c edited by Yves Pauleau.
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300 $a xiii, 363 p. : $b ill. ; $c 25 cm.
440 0 $a NATO science series. $n Series II, $p Mathematics, physics, and chemistry ; $v v. 55
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504 $a Includes bibliographical references and index.
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